VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

C95Series

D-A44 Conduit , _;-c' I>-F5CJ51!:1 Grommet D-F5i!

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

HRX-OM-W002

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

C95

, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Flow Rate Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 12 (PA) 23 (AR) Valve model Flow rate characteristics Weight (g) Note) Actuation type Port size Effective area (mm2) L/M plug connector M8 connector Grommet 10-SYJ312M 10-SYJ322M 10-SYJ314M Body ported N.C. 0.41 0.36 0.18 0.31 0.086 0.089 0.35 0.36 0.33 0.31 0.086 0.089 32 M3 x 0.5 33 0.9 37 N.O.

Refrigerated Air Dryers

[C] Correction factor 2 to 25 1.14 30 1.04 32 1 35 0.96 40 0.9 Ambient temp. [C] Correction factor 2 to 25 1.06 30 1.02 32 1 35 0.99 40 0.98 45 0.92 Ambient temp. [C] Correction factor 2 to 25 1.10 30 1.05 32 1 35 0.95 40 0.90 Ambient temp. [C] Correction factor 2 to 25 1.2 30 1.04 32 1 35 0.93 40 0.84 Ambient temp.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

VQ4000

SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Cylinder with Lock Series MNB

C ??

SMC Electronic Switch Series Variations

10.2 8 10 17.6 10 5.5 2-3.3 Mounting hole 3.10-4 ZSE2/ISE2 Dimensions/Standard: ZSE201 T1 01 T1 01 T1 Grommet style/ZSE2-15 Connector style/ZSE2-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 Lead wire length 600 15 (3000) H H L L 20 20 Lead wire length 600 Lead wire length 600 Lead wire length 600 (3000) 9.5 39 8.5 39 8.5 3.5 3.5 3.5 Mounting hole

15

1 y, z + A = 200 y, z + A = 300 1 y, z + A = 200 0.1 y, z + A = 300 0.01 0.1 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the

Compact Electric Actuator Series LG1

100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100

New

P2 + 0.1 When b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t P2 + 0.1 When > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 293 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 273 + t Q: Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are allowed to be described by L (liter). 1 dm3 = 1 L 28 Solenoid Valve Flow-rate Characteristics Series VXN/VX2 C : Sonic conductance

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note 2) Based on JIS C 4003 Option Foot bracket (With screw) (1) Part no.

HRX-OM-X084

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

VZS

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306.