Compact Guide Cylinder

Dimension C is 68.5 mm.

Slider Type Ball Screw Drive/11-LEFS Series

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

CNG

IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Thermo-chiller

type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option

Compact 5-Port Solenoid Valve

D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)

MY1

MY1CW40 MY1CW50 MY1CW50 MY1CW25 MY1CW25 MY1CW40 MY1CW40 MY1CW32 MY1CW32 MY1CW20 MY1CW20 5 5 1 MY1CW32 MY1CW32 4 4 MY1CW25 MY1CW25 MY1CW16 MY1CW16 3 3 MY1CW25 MY1CW25 MY1CW20 MY1CW20 MY1CW20 MY1CW20 0.5 2 2 MY1CW16 MY1CW16 0.4 MY1CW16 MY1CW16 D0.3 1 1 -X 0.2 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

Compact Type

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 Clevis Pin 80, 100 Material: Cast iron l Material: Carbon steel Part no.

Thermo-chiller/Rack Mount Type

Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating