Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Digital Flow Switch Series PFA For Air Series PFW For Water

40 Max. 30V 80mA or less OUT1 Black Load ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

VS7-6

Unit 1 4 3 8 Individual SUP spacer with residual pressure release valve VAW-M (Adaptor plate, filter with manual drain cock, regulator) 02: 03: VV71-PRAir filter with manual drain Regulator Pressure switch IS3100-X230 (2-M5 X 12) Double pilot check spacer with residual pressure release valve VV71-FPGR Air release valve Pressure switch Manifold/Applications Blank plate (Air release valve)

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 4 (1/4 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 3 (1/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 01 (1/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: B (Bracket), Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: B (Bracket), Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: 6J (6 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: 8J (8 + J), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: B (Assembly of a Bracket and Set Nuts), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: BM (B + M), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: R (Flow Direction: Right to Left)