XL Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.
1 m) 4 x 13 Power cable holder (Electric wire diameter 9 to 11) [opposite side] [mm] Dimensions Model Port size A B C D E F G H J K L M N P Q R IDF22E R1 290 775 623 134 405 698 93 46 25 13 314 85 600 340 IDF37E R1 1/2 855 680 IDF55E R2 470 855 800 128 455 868 110 36 50 13 500 75 700 526 250 519 IDF75E 900 968 13 Refrigerant R407C (HFC) Applicable Compressor Size: 100 kW, 125 kW, 150 kW
HRSH Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OM-R026 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.
Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135
The weight will increase by 1kg when option J [Automatic fluid filling] is selected. 12 For option J [Automatic fluid filling port]. 13 Copper, bronze and brass is not included when option M [DI water piping] is selected. 14 In case of option B [Earth leakage breaker], the breaker is changed to an earth leakage breaker. 15 For water -cooled type.
The weight will increase by 1kg when option J [Automatic fluid filling] is selected. 12 For option J [Automatic fluid filling port]. 13 Copper, bronze and brass is not included when option M [DI water piping] is selected. 14 In case of option B [Earth leakage breaker], the breaker is changed to an earth leakage breaker. 15 For water -cooled type.
300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10, 3/8", 12 91 (97) 22.5 30 45 20 6 13.5 41.5 25 33 58.5
The weight will increase by 6kg when option T [High pressure pump] is selected. *12 In case option T [High pressure pump] selected. *13 In case option T [High pressure pump] selected, this fitting is not enclosed as accessory. *14 In case option J [Automatic fluid filling] selected.
0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C
8 Max. speed [mm/s] 400 200 400 200 400 200 Min. speed [mm/s] (Independent and interpolation) 20 10 20 10 20 10 Min. speed [mm/s] (Speed tuning control) 25 13 27 14 30 15 Supplement 1.4 Initial setting of LEP series Model LEP8 LEP16 Lead symbol J K J K Lead [mm] 8 4 10 5 Stroke (mm) Others 25 Others 25 Max. speed [mm/s] 300 250 150 350 250 200 Min. speed [mm/s] (Independent and interpolation
Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 l h 9 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G MM
G5-S Width across flats B1 CV Rod d9 MVGQ CC Connection port A ZZ + l + Stroke Z + l + Stroke h + l RB S + Stroke Z + Stroke ZZ + Stroke J Stroke range Bore size (mm) DA AL B B1 C D E F H1 HX CX CDH10 CZ J K L (mm) 40 50 63 80 100 32 40 40 52 52 8 11 11 13 16 147 157 173 189 203 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 30 35 35 40 40 + 0.059 0 + 0.3 + 0.1 + 0.3 + 0.1
1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C
Table 6.1-1 Specification of earth leakage breaker Model Rated current [A] Sensitivity of leak current [mA] HRS050-A-20-B-R 20 30 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling.
HRS090 Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OMT002 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.
JXC-OMU0026 Supplement 1.3 Initial setting of LES(H) series Model LES(H)8 LES(H)16 LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min. speed [mm/s] (Independent and interpolation) 20 10 20 10 20 10 Min. speed [mm/s] (Speed tuning control) 25 13 27 14 30 15 Supplement 1.4 Initial setting of LEP series Model LEP8 LEP16 Lead symbol J K J K
Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 h 9 2 x 4-J N F l H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G
M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI W S CEP1 CE1 Rod side flange style: CEP1F12 Stroke CE2 ML2B 4 (Positioning pin hole) C J G5-S CV 4 +0.05 +0.02 (Positioning pin hole) +0.05 +0.02 MVGQ 27 18 CC 6 RB 5.5 38 4-4.5 J 50 D-X 20Data 10-12-13 13 Series CEP1 Dimensions: 20 Direct mounting, rod side tapped style: CEP1B20 Stroke (Positioning pin hole) 4 depth 4 Cable end + 0.05