NCA1

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

5-Port Solenoid Valve

1 SY 3 5 1 0 0 1 Base mounted !

smcmaintenancepartslist

1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Actuators Modular F.R.L.

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

0.4

0 1 " !2 0 !2 1 " 1 ) " 3 . # / " . # / " ' ) 3 3 ) ' " 0 ) ) 4 3 1 0 !2 1 " 1 " 0 !2 1 -) " )* + , . # / " . # / " D ! " $%& "# $%& ' 0 !2 1 " 1 " 0 !2 ' * "# $%& 1 ) ) . # / " E "!#$ %! ! &%&&% !

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

0.4

VQ 0 5 1 1 0 1 VP4 CE-compliant Series VQ 1/2 VQ 1/2 VV5Q11-08C6SV VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Section 11.8 1 5 1.

0.4

P Note 1) U S U S U S w U S U S AXT100-1-J 20 Note 1) AXT100-1-F Note 1) e Note 1) Top entry connector for FU, PU, JU while side entry connector for FS, JS, PS.

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

HRX-OM-X010

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

10

65.5) 61 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 ( ): Denotes the Normally Open (N.O.) dimensions. 33 Series VX21/22/23 For Steam Can be used with heated water.

Fieldbus system EtherCAT compatible SI Unit

System 4 1: Diagnosis of SI unit is generated. 5 1: Diagnosis of IO-Link master unit is generated. 6-7 Reserved 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 Unit 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7.

ITV

Figure 1.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

HRX-OM-K003

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Circulating fluid disposal. 1-15 1.7.2 System disposal . 1-15 1.8 Material Safety Data Sheet (MSDS) . 1-15 Chapter