VZM400 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 Best Pneumaticsz-2 (EB) (P) (EA) Side ported 1/8 VZM500 5 port (A) (B) 2 4 Rubber spool 12 3 1 5 14 (R2) (P) (R1) VFM200 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 (EB) (P) (EA) Side ported 1/4 VFM300 5 port (C2) (C1) 2 4 Rubber spool 12 3 1 5 14 (E1) (S) (E2) Front matter 2 2/3 Port Mechanical Valve Series VM100 RoHS Compact size Piping
pushing to the reverse direction from position No. 5 is completed (1) (2) Forward Reverse direction direction (3) Start position End position Operating direction speed acceleration Operation method (1) No. 3 No. 4 Reverse 9 7 Pushing (2) No. 4 No. 3 Forward 5 3 Positioning (3) No. 3 No. 5 Reverse 9 7 Pushing I/O timing chart when the electric actuator is operated by PLC. (1) (2) (3)
INP (24)(21)(16)(13)(8)(5) The move to the position set in Step Data No.1 is completed. BUSY (9)Select input Step No.2. (Turn the IN0 input OFF, and the IN1 input ON.) (10)Turn the "DRIVE" input ON. Move to the position set in Step No.2. (11) Step No.2 output is turned ON. (OUT0 output is turned OFF, OUT1 output is turned ON.) (12) INP output is turned OFF.
Note 2) Output when the power supply of the driver is ON. (N.C.)
Facility water inlet 64 75 Facility water inlet Signal cable outlet R1/2 (When symbol 5 is specified.) R1/2 (When symbol 4 is specified.)
4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72
4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.
0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.
A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1
LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12
B 2 x 4 x Square nut M5 x 0.8 LER 8.5 5.5 (105) 105 Stroke LEH [Origin]Note 1) Origin Note 2) Origin Note 2) When LECP1, LECP6 or LECPMJ is used. 3 5.3 When LECP2 is used. When LECP2 is used.
Content of diagnosis 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. Unit diagnosis byte1 Bit No.
5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !
Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.
5 !3 !7 !8 !6 !6 !0 !2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !
For replacement parts, refer to page 2-5-47. Refer to pages 2-5-40 to 2-5-43 for control unit.
5 5 DHCP mode Note 2) 2 5 6 Unused : : : 9 9 9 Note 1) The mode to set IP address by DHCP server.
) 1 15 20 CG1 D-P4DW n 15 + 65 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 65 (n 2) 2 (n = 2, 4, 6, 8) Note 1) CG3 Note 1) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.
layout 1) 5 M12 (4-pin/5-pin) A-coded IN/OUT (PIN layout 2) : Refer to Connector Pin No.