4-channel Flow Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.

Quick Exhaust Valve Series AQ 1

In-line type 04 06 07 4 6 1/4" With exhaust port fitting With One-touch fittings Note) Brass parts are all electroless nickel plated. Caution Be sure to read before handling.

AKH/AKB Series Check Valve with One-touch Fitting

00 Straight Type AKH 04 A 01 S Male Connector Type With sealant (standard) Not applicable to types M5 & 10-32UNF are not required.

VXZ

Rated voltage 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2232 2232 2242 2352 2362 4 5 6 7 8 9 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC for inquiry.) Refer to the table (1) given below for availability. Refer to page 17-3-65 for ordering a coil only.

Series IDG

When very clean air is required, install a separator as mentioned above on the downstream side, or instead of a regulator, use the order made specification (refer to page 35) fitted with a micro mist separator regulator (series AWD). 3.

With Factory Installed

Bowl a-ring NBR 11297 111512 111636 4D Valve a-ring NBR 1349247 131544 131645 CB a-ring NBR JIS B2401P5 JIS B240 1P5 Note) Bowl assembly of AW3001 and AW4001 are f,tted with a bowl guard(SPC) as standard. 8 Series AW Dimensions Panel mounting hole AW2001 ~ A W2001 : Max.3.5t 5 34 1 .4

VSA4

Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440-06 1 8 Rc 2 position single SA 1 2 1.31 1 8 Rc 3 4 1 2 1 8 Rc 2 position

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

A L1 Applicable tubing O.D. d 0 0 5 10 AS-DPP00092 AS-DPP00093 4 6 19.4 16 46.9 43.5 42.7 39.3 Number of needle rotations 624

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Description Material Note 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Knob POM 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 O-ring NBR 8 O-ring NBR 9 Cassette 10 Seal NBR 11 Bonnet A POM 12 Bonnet B POM 13 Gear POM 14 Indicator gear POM 15 Clip Stainless steel 16 Gasket NBR/Stainless steel q t r u i !6 !

99

Applicable for a wide range of liquids The element is applicable for a wide range of liquids because it adopts PTFE seals.

One-touch Fittings

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 3 Metric Size One-touch Fittings KQ2-G Series Variations Bulkhead Union Hexagon Socket Head Male Connector KQ2E-G P.18 Use to connect tubing through a panel etc. P.6 KQ2S-G Internal hexagon socket allows tightening with a hexagon wrench in confined spaces. Extended Male Elbow Basically, it is used together with a male elbow.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

SV

option L1 4 A 4 A 4 A 4 A 41 42 E 3/5 E 3/5 64.2 2 B 2 B 2 B 2 B (Station n) (Station 1) 77.5 1 P 1 P 78 E 3 P 1 Light/Surge voltage suppressor (6) Individual EXH spacer Individual SUP spacer MAX.14 109.5 SV100-06Interface regulator SV100-05Interface regulator (DIN rail dimension) 61.2 (47.3) 7.5 48 19.7 Block separation lever B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Table of Contents

screw, use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter.

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !