HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Valve Single Unit

Series SX3000/5000/7000 Body Ported Valve Single Unit How to Order 5 L N SX 5 1 20 01 Series Bracket 3 SX3000 5 SX5000 Nil: Without bracket F1: With foot bracket 7 SX7000 Type of actuation 2 position single 1 2 position double F2: With side bracket 2 Manual override Nil: Non-locking push type 3 position closed center 3 Thread type Nil Rc 3 position exhaust center G F D: Push-turn locking

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

Table of Contents

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 types of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double Check block 2-4-25 Body Ported 26 Series VQ1000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Metal] Metal case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 20, Accessory: Without optional

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/8, Mounting: None, Semi-Standard, Body Size 10: Nylon Bowl, Semi-Standard, Body Size 20: Bowl Guard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Drain Cock, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/8, Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Bowl Guard, Semi-Standard, Body Size 30, 40, 50 & 60: Flow Direction: Right to Left

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/8, Mounting: None, Semi-Standard, Body Size 10: Nylon Bowl, Semi-Standard, Body Size 20: Bowl Guard, Semi-Standard, Body Size 30, 40, 50 & 60: Flow Direction: Right to Left

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: C (Bowl Guard), Semi-Standard, Body Size 30, 40, 50 & 60: Standard