Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

High Vacuum Angle Valve, XL Series

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Fieldbus System

A B A B A B A A A B For the I/O Unit part number mounted, refer to the following pages.

Clamp Cylinder with Lock

Mounting Allowable Auto Switch: Band Mounting / Standard Auto Switch Load voltage Wiring (Output) Lead wire length (m) Auto switch model Applicable cylinder series Applicable load Electrical entry Indicator light Type 0.5 (Nil) 3 (L) P 5 (Z) P Band mounting DC AC A93 100 V 100 V 200 V Reed switch CLK2G series Solid state switch Grommet Yes 2-wire 24 V 12 V P P P B54 Relay, PLC p p P P P

Modular Type Lubricators Series AL

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

SMC Electronic Switch Series Variations

F.S. = 5[V] 1[V] = 4[V] 3[%F.S.] = 4 X 0.03 = 0.12[V] Detection Analog output voltage [V] Pressure indication [kPa] Switch The output error induced by the temperature change can be as much as 0.12[V]. 1.12 1 0.88 P3 0 Vacuum Pressure Rated pressure P1 P2 103 100 97 Pressure display = 100[kPa] Temperature characteristic = 3[%F.S.]

Compact Cylinder

Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Indicator light Load voltage Model Type Wiring (output) Applicable load Electrical entry DC AC D-A93V-588 24 V 12 V Yes Reed switch Solid state switch Grommet (Perpendicular) IC circuit D-A90V-588 48 V 24 V or less 48 V or less No 2-wire D-A93-588 Relay, PLC 12 V 24 V Yes Grommet (in-line) IC circuit D-A90-588 48 V 24 V or less 48 V or less

LVQ

T) LVA V LVH M N LVD LVQ30, LVQ50 V SMC LVQ SMC B A SMC C LQ B A U D LVN Z (Max. T) TI/ TIL PA M N PAX LVQ40, LVQ60 PB C B A D (Max.

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D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

C For vacuum pressure 0.0 to 101.0 kPa 10.1 kPa 0 101.0 kPa Analog output [mA] 5 20 Analog output [V] For compound pressure 100.0 to 100.0 kPa 100.0 kPa 100.0 kPa For positive pressure 0.100 to 1.000 MPa 0.100 MPa 0 1.000 MPa 0.100 to 2.00 MPa 0.100 MPa*1 0 2.00 MPa 1 4 *1 Analog output is 0.8 [V] or 3.2 [mA] at the pressure A. 0.6 2.4 B A C B A C Pressure Pressure Functions Sub screen setting

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Special function Indicator light Wiring (Output) Electrical entry Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) Applicable load DC AC Perpendicular In-line IC circuit 5 V 12 V 100 V or less A90 A90V No Relay, PLC 24 V 2-wire A93 A93V Grommet 100 V 12 V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire

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Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N P P P p p IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P P P P p p 2-wire 12 V M9B P P P p p 3-wire (NPN) 5 V, 12 V M9NW P P P p p IC circuit 3-wire (PNP) M9PW P P

CJ5-S

Basic style (B): CJ5BS NDn8 GA GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 MM NN CA CB RE A B D REC CX F NA NB A With head cover port in axial location (R) BB H BA S + Stroke 0 0.3 0 0.3 CY Z + Stroke MQQ M RHC Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20

CJ5-S

Lead wire length (m) Load voltage Indicator light Wiring (Output) Applicable load Special function Type Electrical entry Pre-wire connector Auto switch model DC 3 (L) 5 (Z) 12 V 24 V Yes Water resistant (2-color indication) Solid state switch Relay, PLC G5BA 2-wire Grommet Solid state switches marked with are produced upon receipt of order.

High-Precision Digital Pressure Switch

ZSE20(F)/ISE20 ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) M5 female thread ZSE30A(F)/ISE30A M5 female thread Grommet type Lead wire ZSE/ISE40, 80 Series 3 High-Precision Digital Pressure Switch ZSE20m(F)/ISE20m Series 3-Screen Display Available Mounting Options Mounting Series Bracket A Bracket B Bracket C Panel mount 20 V V V 20A V V V 20B V V V 20C V V V The bracket configuration

AR Series Modular Type Regulator

Example) AR30-03BG-NR-A-X2068 AF-A AF-A Nq Body size 20 25 30 40 Symbol Description AR -A -B AL-A Nw Pipe thread type Nil Rc V V V V N NPT V V V V F G V V V V + AW -A -B AW 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + AG Ne Port size E AV a Mounting Nil Without mounting option V V V V B Note 2) With bracket V V V V H With set nut (for panel mount) Note 3) V V V V + Option Note

180° Angular Style Air Gripper Series MHY2/MHW2

around the Z axis of B part of attachment Axis on the center gravity of A part of attachment and parallel to Z kgm2 Axis on the center gravity of B part of attachment and parallel to Z Z2 Weight of A part of attachment kg kgm2 Weight of B part of attachment kg Total moment of inertia for attachment Z1 Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment

REA/REB

L V V High Precision Guide Type REAH B: Maximum speed Load weight chart> 100 REBHT32 REBH(T)25 Max.

Compact Type

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .