Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

/C8 D-H7 A B 12 Hs 14.5 24.5 Auto switch D-B5/B6 D-G5/K5 A B 8.5 Hs 14.5 11 Auto switch D-B7/B8 D-G7/K7 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5/K5 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5W D-K59W D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C

VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

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VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5

Stainless Steel 316 Fittings

of R thread Note 1) D is maximum diameter.

CATALOG VC10

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

VQZ1000/2000/3000

Dimensions Note) A B 29 33 41 D 67 81 93 C 40 52 63 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Individual EXH spacer VVQZ1000-R-5-M5 (VQZ1000) VVQZ2000-R-5-01 (VQZ2000) VVQZ3000-R-5-02 (VQZ3000) M5: VQZ1000 Rc 1/8: VQZ2000 Rc 1/4: VQZ3000 Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold block.

One-touch Fittings

Q D M L 1: D is maximum diameter.

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Guide Cylinder Series MGG

D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F MGT Auto switch model Auto switch model D-G59F D-G5 D-K59 D-G5W D-K59W D-G5NTL D-G5BAL D-C7 D-C80 D-H7 D-H7W D-H7HF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7 D-C80 D-C73C D-C80C D-A9 D-M9 D-M9W D-M9 D-M9W D-B5 D-B64 D-B59W D-C73C D-C80C D-A9 Bore size (mm) Bore

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP 1 X 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

KR

Note 1) D: Max. diameter Note 2) ( ): Values for nylon. Hexagon Socket Head Male Connector: KGS H (width across flats) Connection thread R Model L A M Effective area (mm2) Nylon Urethane Applicable tubing O.D.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Standard stroke (mm) Model 100 75 50 40 30 20 10 CXSM6-R CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R 0.105 0.105 0.18 0.18 0.3 0.32 0.465 0.485 0.72 0.73 1.33 1.35 0.12 0.12 0.2 0.2 0.33 0.35 0.5 0.52 0.76 0.77 1.43 1.45 0.135 0.135 0.225 0.225 0.355 0.375 0.54 0.56 0.8 0.81 1.53 1.55 0.15 0.15 0.25 0.25 0.38 0.4 0.58 0.60 0.84 0.85 1.62

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~ "~ R f-:: h r~~ h \ I 1I : tIlw ';1 ' t:rI D I-=' ~ ~ ::;: P , ~ \ -.-J ~ 0!.. A F N N CT I---"-: Kl.

LVQ

D (Max.

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D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.