Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

C 2-M5 x 0.8 2 x 4-OB 2 x 4-OA effective depth RA Y Q F Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

CM2

2 !3 !4 !5 !6 !

SFOD-OMT0005CN

Para protect 12 1+(++) 2(+) Enable SW Enable SW 12 SW 1 2 Unit name Unit name () W-AREA1 W-AREA1 (-) (+) WAREA ON (mm) W 1W 2 WAREA ON *W 1W 2 PARA W 1=W 2=0 WAREA OFF) W-AREA2 W-AREA2 (-) (+) ORG Correct Link Offset () Sensor type Sensor type () Option 1 Option 1 () Undefine No. 11 Undefine No. 11 () Undefine No. 12 Undefine No. 12 () *1 -45- 10.3 () ORIG

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Sine Rodless Cylinder Series REA/REB

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

HRX-OM-M090

Facility water source to be prepared (For water-cooled type) Table 3-2 Facility water source to be prepared Required facility water rate Heat Facility water temp. l/min Model Radiated range Facility water temprature kW oC 25oC 32oC 40oC 8 12 20 HRS012-W -20 Approx. 2 5 to 40 HRS018-W -20 Approx. 4 12 15 23 (Rating 25) HRS024-W -20 Approx. 5 14 17 25 3.2 Installation HRS Series 3-6 HRX-OM-M090

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Integrated Controller

12 10 8 6 4 2 0 3000 mm/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

MHZ

, refer to page 12-2-51 to 12-2-52 for option specifications. 12-2-43 43 Series MHZJ2 Construction: MHZJ2-6 Double acting/With fingers open Single acting/Normally open !

MHZ

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-52 53 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) q t r w y e q t r w (B) 2 (A) 4 (A) 4 (B) 2 SV i SZ i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) SY SYJ u 3 position closed center/exhaust center/pressure center SX