0.4

1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 537 Connector Type Manifold VQC1000/2000 Series IP67 enclosure compatible Dust-tight, Immersion-proof (Based on IEC60529) (S/T/L/M kit) Power saving Standard: 0.4 W (Reduced by 60% compared to current model) High-pressure (1 MPa, Metal seal): 0.95 W Accommodates gateway-type serial wiring.

REA/REB

12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8

Air Fittings & Tubing

<M5, M6> D P M Part No.

Air Cylinder

Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(For type 20 manifold) 10 M 1 SYJ3 2 5 M M3 Body ported 10 M SYJ3 4 5 M 1 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only. Coil type Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available for W type.

AC Servo Motor Driver

3.24[N m] (28.7[lb in]) W W 10 2 10.

Aluminum High Vacuum Angle Valve

indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9/

Sine Rodless Cylinder Series REA/REB

PW QW W N X WS Q Z L T M Nil TN TF REAR10 19.5 15 39.5 14 20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Air Cylinder Series CM2

SN-020B SN-032B SN-040B Material: Carbon steel 8 26 M20 x 1.5 30 25.5 d D 8 32 M26 x 1.5 37 31.5 10 41 M32 x 2.0 47.3 40.5 l m m t t L Trunnion Nut (mm) Part no. Applicable retaining ring part no. Applicable bore size Dd9 l d L m t H Material: Carbon steel 0.040 0.076 0.040 0.076 Note) Retaining rings are attached.

Modular/F.R.L. Units Series AC

L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

0.8 / / / / T 20 24 36 44 56 V 18 22 20 28 28 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 D1 8 1 8 1 8 1 8 -X Individual -X Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

HB HT HC N X A W K 2-plug H HA CB T 4-counterbore dia.

Table of Contents

AC Symbol Specifications DC (1.0 W) (1) Standard type Nil With light/ surge voltage suppressor M: M plug connector With lead wire 3 position closed center (1.5 W) (0.5 W) H (2) High pressure type 3 Note) Low wattage type Y (2) With light/ surge voltage suppressor MO: M plug connector Without connector For power consumption of AC type, refer to page 2-4-36.

Series VQ Metal Seal/Rubber Seal Body Ported

assembly (8 terminals) T kit (4) (4) r AXT100-2-TA2 Terminal block assembly (8 terminals) T kit t VQ Note 1) A S kit is composed of a flat cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Cable (Length) 0 1 2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Connector entry direction U S Top entry Side entry 2-4-78 Body Ported Series VQ1000 Plug Lead Unit: Cassette Type 43.5 (M plug connector AC, Latching) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Side entry connector [-PS] 38.5

CG5-S

m t l m L (mm) Part no.

Vacuum System Peripherals:

q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.