3

75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 59 F 5H9 +0.030 0 depth 5 29.5 D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BD-25 LXFH5BD-50 LXFH5BD-75 LXFH5BD-100 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 6 Refer to page 299 for mounting. (11.5) 38 E Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg

SFOD-OMT0009CN

No. 1 11 21 31 2 12 22 32 3 13 23 33 4 14 24 34 5 15 25 35 6 16 26 36 7 17 27 37 8 18 28 38 9 19 29 39 10 20 30 40 I/O1 I/O2 38 No.SFOD-OMT0009CN-B (1) I/O1 No. 1 +COM1 DC24V24V IN0IN10SETUPHOLDDRIVERESETSVON OUT0OUT8BUSYAREASETONINPSVRE*ESTOP*ALARM 21 +COM2 2 IN0 22 IN1 Bit No. ( 512) 3 IN2 23 IN3 Bit No.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

21 21 21 44.5 44.5 44.5 44.5 Refer to the page 68 for dimensions with connector cable. 20 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

70 30 128 119 108 50 42 8-8-21 21 Series MXP Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range MXP10/12/16 MXP6 Applicable bore size (mm) Auto switch model 6 10 12 16 Electrical entry from outside D-A9/A9V 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) A A D-M9/M9V/F9W/F9WV Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

Modular Type Lubricators Series AL

U 34 40 54 A NPT 1/4 NPT 3/8 NPT 1/2 W 2.3 2.3 2.3 X M28 X 1 M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 28.5 38.5 42.5 T 15.4 8 10.5 E 30 38 F 70(max.73) 83(max.86) 88(max.92) Z 6 7 7 AA 14 19 21 Y 30 31 35.5 H 5 3.5 1.5 S 5.4 6.5 8.5 AW20 AW30 AW40 Auto Drain mm Dimensions Model Port Size C NPT 1/8 NPT 1/4 GaugePort D 53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5) VQ56 1 78 or less Rubber seal 75

VQ5000

or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5) VQ56 1 78 or less Rubber seal 75

Slider Type Ball Screw Drive/11-LEFS Series

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25SlB/Ball Screw Drive LEFS25SlB/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

44

17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

87.5 98 75 100 110.5 13 14 15 16 17 18 19 20 21 22 23 24 174 187.5 198 n L L1 L2 L3 163 187.5 198 196 212.5 223 218 237.5 248 240 250 260.5 251 262.5 273 273 287.5 298 185 200 210.5 207 225 235.5 229 250 260.5 262 275 285.5 284 300 310.5 How to Order Double check block VQ1000FPG F M5 C4 IN side port size OUT side port size Option None With blacket F C4 C6 One-touch fitting for

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Booster Regulator/Air Tank

Horizontal (Floor mounting) 6.6 10 14 21 Carbon steel (SS400) Outside: Silver paint, Inside: Rustproof paint Note) Accessories are included in the same container.

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =