NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

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'i,-.1-)^' l z N F Noz l!

MGC

42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20 47 12 25 M8 x 1.25 38 60 125 95 70 40 Rc1/8 20 241 104

Rotary Table/

Lead wire length symbols: 0.5m Nil 3m L 5m Z Solid state switches marked "" are produced upon receipt order.

Table of Contents

5.7 21 3 8 Connection thread 6.35 6.5 21 7.94 8 22 20 1 2 9.53 9.6 22 21.3 Reference dimensions after NPT thread installation.

Slider Type/Ball Bushing Bearing

P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical Data 1533 CY1H Series Dimensions Double axis type: / 25, 32 CY1HT25/32 LL 138 PA 4 x M thread depth MM 25 32 CY1HT -B XB PB XA S + Stroke 2 x Rc 1/8 LW EA EB HC HP H HA HT HG HB NT Square nut for

CE2

+ Stroke RS Q G RS H A RZQ Double clevis style MI W S Z + Stroke CEP1 CE1 CE2 ML2B Center trunnion style Z + 1/2 stroke C J G5-S CV MVGQ CC RB Rod side flange, Head side flange Rod side flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60

LVQ

T) U Z M N LVQ40, LVQ60 C B A D (Max.

MGC

P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104

High Vacuum Angle Valve

D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

NCA1

NC D A1 X46US Z-Dimension use a four digit number Ex: NCDA1T 250-0400-XB5-X46US-0700 Auto-switch capable Oversized Rod Z Dimension Special Trunnion Location NC A1T (200 ~ 400) * XB5 X46US * (in) Z RANGE MIN MAX Bore (in) MM KK A AA B BA C D DD E EA EE G J R TL TM TT UM UV WF Y P LF XI ZB 200 (2) 1 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 1.26 1.06 1.84 1 3 1.18 5 2.56 1 1.71

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

A

H O W T O O R D E R C H E C K VA LV E S E R I E S (N)AKM D I M E N S I O N S C H E C K VA LV E S E R I E S NAKM S Y M B O L S (N)AKM Japanese N North American P O R T S I Z E B O D Y S I Z E 01 18 02 14 03 38 20002000 Series 30003000 Series 40004000 Series P O R T T H R E A D mm Rc(PT)* Remove (N) when ordering N NPT Model Port Size A B C D E NAKM2000 18 14 40 40 28 11 11 NAKM3000 18 14

MQQ

FX FZ H 2-FC S + Stroke ZZ + Stroke D-X 20Bore size (mm) FC FT FX FY FZ H ZZ S Data 10 5.5 2.3 33 20 42 28 101 65 16 5.5 2.3 42 24 54 30 114 74 20 7 4 60 34 75 40.5 151 97.5 25 7 4 60 40 75 44.5 160 102.5 10-5-21 21 Series MQM For other dimensions, refer to basic style on page 10-5-20.

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

MNB

Z (Ex.)

MY2

g x Y m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

HRX-OM-Y098

(IEC 60417-5032-1) How to see the serial number Z o 001 (Jan 2021) X R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2021 Z Repeated from A to Z in alphabetical order 2022 A 2 P 2023 B 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-Y098 Chapter 1 Safety Instructions

AC Servo Motor Driver (Pulse input type)

(Note 8) 33 OP Encoder Z-phase pulse (open collector) 1 P15R SD Plate 10m max. (Note 7) 2m max.