ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)

MXS Series Air Slide Table

RB1411 70 47 12 78.3 19 12 M6 X 12 27 13 25.5 M6 X 25 MXS25 MXS-BT25 RB1412 80 54 15 79.3 19 12 M8 X 16 33 17 25.5 M8 X 25 Mounted to body MXS-BT 8, 12, 16 MXS-BT 20, 25 WIDTH ACROSS FLATS E D WIDTH ACROSS FLATS E B C B D WIDTH ACROSS FLATS F C A A P P Mounted to table HOW TO ORDER H Q MXS 12 BS I J Bore size (stroke mm) 8 12 16 20 25 10,20,30,40,50,75 10,20,30,40,50,75,100 10,20,30,40,50,75,100,125

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

0.4

2 Gasket Seal Clamp screw Clip HNBR HNBR Carbon steel Stainless steel 12 12 12 12 Pilot valve assembly V112 A Function Coil voltage Note) A set of parts containing 12 pcs. each is enclosed. 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC (0.4 W) Note 1) Nil Standard (0.95 W) High-speed response type B (0.95

CNG

Connector Grommet Diagnostic indication (2-color indication) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (PNP) 3-wire (NPN) IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication

CL

12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 31 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB With air cushion: CLG1BA CNA CNS CLS CLQ MLGP RLQ Component

CNG

Connector Grommet Diagnostic indication (2-color indication) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (PNP) 3-wire (NPN) IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication

CL

12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 14 14 14 15 12 12 12 13 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 31 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

LEC-OM071xx

CMD_DATA/RSP_DATA: Specified for individual commands. 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Main Command Area CMD_DATA RSP_DATA 8-12 8 MECHATROLINK-III Commands Byte Command Response Description 32 SUBCMD RSUBCMD SUBCMD/RSUBCMD: 33 Command code specified for individual commands. Refer to 8.15 Subcommands.

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

Vacuum System Peripherals:

) Diaphragm reed switch (100 VAC) 1 point setting M21 Note) Low wattage type is,12, 24 VDC.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

PLC Fieldbus network Gateway (GW) unit Serial communication RS485 Up to 12 controllers are connectable.

LEC-OM069xx

SV_OFF 12 Disconnect the communications connection. DISCONNECT 13 Turn the control and main circuit power supplies.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

VDC Symbol Rated voltage Symbol Rated voltage 1 100 VAC 7 240 VAC 2 200 VAC 8 48 VAC 3 120 (110) VAC B 24 VAC 4 220 VAC J 230 VAC i Electrical entry o Coil orientation Symbol Electrical entry CE/UKCA-compliant Symbol Orientation Nil Upward U Downward G Grommet*1 12 VDC 24 VDC 100 VAC 24 VDC 12 VDC 48 VAC 24 VAC !

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

HRX-OM-W002

20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Built-in magnet for auto-switches CV MVGQ Maximum Driving Speed of Cylinders 1000 1000 900 900 Cylinder speed (mm/s) Cylinder speed (mm/s) 800 800 Load factor: 10% Load factor: 50% 700 700 600 600 500 500 400 400 300 300 200 200 100 100 0 12 16 20 25 32 40 50 63 80 100 0 SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) Series Variations Bore size (mm) Standard stroke (mm) Applicable valve series

Compact Rotary Actuator Series CRQ2

V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)