5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

MTS

Weight (g) Standard stroke (mm) 30 56 End lock additional weight 50 75 100 125 Model 150 20 48 175 15 44 200 10 40 5 36 25 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 52 138 186 350 487 918 1,420 29 34 42 55 90 133 157 222 400 547 1,000 1,533 175 258 450 608 1,083 1,645 194 294 500 669 1,165 1,758 699 912 1,495 2,208 649 851 1,412 2,095 549 729 1,247 1,870 599 790 1,330 1,983 8-10-12 12

CG1

) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5 44 55 69 80 301 to 450 10 (13) M6 X 1 Depth 12

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] 20 20 20 20 Pg7 127.2 [131.6] 107.6 [112] 22 22 22 22 147.2 Max. 10 145.4 110.6 125.4 97.6 65.6 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 56 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 01 02 Grommet (G), (H): SYJ7 4022 12 G: Approx

Cylinder with Lock Series MNB

size (mm) J T P MM N S V GF K Q H W ZZ GL GL1 GR GE VA 34 1/8 M10 x 1.25 27 154 6.5 32 18.3 6 37 47 6.5 211 8.5 12 4 88.5 13 M6 x 1.0 39.5 1/4 M14 x 1.5 27 161 8 40 19.5 6 41.5 51 9 222 10 12 4 96.5 16.5 M6 x 1.0 47 1/4 M18 x 1.5 31.5 183 9 50 22.4 7 47.5 58 10.5 253 12.5 15 5 111.2 20 M8 x 1.25 55.5 3/8 M18 x 1.5 31.5 197 8.5 63 20.7 7 55 58 12 267 17.5 12 9 123.5 23 M8 x 1.25 61.5 3/8

MXW

500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Speed Controller with

AS1002F-01A 1/8" 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 24.1 23 11 15.4 8.8 10.1 13.5 3.7 AS1002F-03A 5/32" 9.3 7.7 10 37.6 4 AS1002F-07A 1/4" 12 10.9 40.1 6.2 12.9 25.2 24.1 12.8 5.2 AS2002F-03A 5/32" 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 31.4 30 12.6 17 10.5 12.3 13.5 6.1 AS2002F-07A 1/4" 12 10.9 43.2 6.5 13.6 31.6 30.2 12.8 7.1 AS2052F-07A 1/4" 13.2 12 4.3 7.8 13 16 52.2 7.6 17.2

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

MGF

30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm/s Select MGF100 from Graph 7.

Guide Table Series MGF

2) When MGF63 is operated with a load weight 30kg and 100mm eccentric distance From Graph 6, the cylinder can be used at a maximum speed of 100mm/s or less. 12

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

RB/RBL/RBQ

Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

] R R 41.4 34.5 L2 237.5 262.5 275 287.5 312.5 325 337.5 29 22.4 19.1 L3 224 240 256 272 288 304 320 L4 12 16.5 14.5 13 17.5 15.5 14 Manual override (non-locking) (7.5) (DIN rail dimension) 16 18 17 19 20 Stations L1 360.5 398 385.5 410.5 435.5 L2 350 387.5 375 400 425 L3 336 368 352 384 400 L4 12 15 16.5 13 17.5 Manual override In case of locking type, ( turn after pushing in. ) G: Approx

HRX-OM-S004

4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-6 Cooling capacity(HRS150-A-20/40/46/46-) 8.4 Cooling capacity HRS Series 8-12 HRX-OM-S004 Chapter 8 Documents : Facility water temperature 32 oC 8.4.3 HRS100-W-20/40/46: Facility water temperature 40 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

MXW Series Long Stroke Slide Table

500 100 200 300 400 600 500 100 200 300 400 600 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 142 Long Stroke Slide Table MXW Series Construction / Parts List Packing List 5 3 4 6 17 18 15 2 1 21 10 16 19 8 7 9 20 12 13 11 14 Parts List Note Material No.