CG5-S

85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130

CJ5-S

20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed when shipped from factory. 10-14-14 15 Stainless Steel Cylinder Series CG5-

CJ5-S

20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 210 110 Flange bracket and plug bolt are installed when shipped from factory. 10-14-14 15 Stainless Steel Cylinder Series CG5-

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

CG5-S

to 800 1/8 30 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 93 147 50 32 to 1200 1/4 35 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 109 172.5 63 32 to 1200 1/4 35 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 109 174 80 37 to 1400 3/8 40 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 130 208 100 37 to 1500 1/2

Card Motor

Mounting angle 10.6 300 7.0 200 LAT3m-10, -20 3.5 100 LAT3m-30 0.0 0.0 0 (Horizontal) 15 30 45 60 75 90 (Vertical) Mounting angle [] Shortest Positioning Time (Guide): Tmin [ms] Fig. 3 Fig. 4 Allowable Thrust Setting Value LAT3-m LAT3F-m 100 300 400 75 Shortest positioning time Tmin [ms] Shortest positioning time Tmin [ms] 6 86 350 W = 300 W = 400 W = 500 LAT3m-10 120 250 W = 400 W = 500

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63

CC

100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 Specifications Operating pressure 0 to 0.7MPa Proof pressure 1.05MPa Ambient and fluid temperature 5 to 50C Fluid Turbine oil (40 to 100cSt) Converter standard effective oil level stroke/effective volume (cm3) Nominal size (mm) Limited flow* (l/min) Standard effective oil level stroke (mm) 100 200 300 400 500 600 700 800 50 63

Electric Slide Table / High Precision Type 《 AC servo motor 》

200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw Ball screwBelt(parallel)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg MY2HT25 Horizontal impact: P = 0.5MPa MY2H25 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 H unit Impact speed mm/s Impact speed mm/s Impact speed mm/s 1000 1000 H unit L unit 500 400 300 500 400 300 L unit Air cushion Air cushion Caution 200 200 Do not use a shock absorber and air cushion together. 100 1 2 3 4 5 10 20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air

HRL

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 HRSH090 Inverter type 0.1 5 to 40 Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option) CH1 0.1 15 to 25 HRL Inverter dual type 26 kW Indoor use

Air Slide Table Series MXJ

Clean Series 11 Standard model no. MXJ Clean Series 11: Vacuum type External dimensions are identical to the standard model.

Multi-channel Digital Sensor Monitor ( compatible)

Y U8 0x00 Refer to Figure Line name communication data (7 seg). 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure Line name communication data (11 seg). (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure Line name communication data (11 seg). (0) 8 R/W Line name 8th letter Y U8 0x00 Refer to Figure Line

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

LG1H

LG1H21PA-100-F LG1H21PA-200-F LG1H21PA-300-F LG1H21PA-400-F 100 200 300 400 60 80 160 260 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

ML2B

CX 100 10 20 30 4050 100 200 300 Thrust energy E2 400 500 Fs Fs + mgs Fsmgs CY W2 max W1 max W3 max Absorbed energy E E1 + E2 MQQ M Caution Allowable load (N) Symbol : Speed of impact object (m/s) F : Cylinder thrust (N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

Process Pump

Since 45% of the amount of clear water discharge is equivalent to 180 mL/min in the required specifications, 180 mL/min 0.45 = approximately 400 mL/min, indicating that a discharge rate of 400 mL/min is required for clear water. 3. Finally, find the pilot air pressure and pilot air consumption based on the flow-rate characteristic graphs.