Sine Rodless Cylinder Series REA/REB

10 50 10 10 86 5.6 M10 x 1.0 M6 x 1.0 31 10 M6 x 1.0 Rc 1/8 NPT 1/8 G 1/8 CX 60 7 10 11 86 10 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 Rc 1/8 G 1/8 NPT 1/8 11.5 70 12 15 100 9.2 M20 x 1.5 M8 x 1.25 47.5 17 M10 x 1.5 Rc 1/8 NPT 1/8 G 1/8 MQ 90 9.2 12 10.5 136 15 M10 x 1.5 M8 x 1.25 M20 x 1.5 14 56 Rc 1/4 G 1/4 NPT 1/4 PA dimensions are for split from center.

Electric Actuator/Slider Type

4 680 700 952 706 867 10 4 680 800 1052 806 967 12 5 850 900 1152 906 1067 14 6 1020 1000 1252 1006 1167 14 6 1020 1100 1352 1106 1267 16 7 1190 1200 1452 1206 1367 16 7 1190 1300 1552 1306 1467 18 8 1360 1400 1652 1406 1567 20 9 1530 1500 1752 1506 1667 20 9 1530 1600 1852 1606 1767 22 10 1700 1700 1952 1706 1867 22 10 1700 1800 2052 1806 1967 24 11 1870 1900 2152 1906 2067 24 11 1870 2000

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Modular Design with Uniform Body Style

v*10 v*10 v*10 v*10 ZA*9 Digital pressure switch: With unit selection function *11 *11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN terminal (D, Y): 10-SYJ5123-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

7ND9071en

Act'r Series Stroke length Controller Series Act'r Series Stroke length Controller Series VD_25 20mm NDX 3 3 VD_25 20mm ND9202 5 7 VC_30 60mm ND9206 6 7 ND9203 4 5 80mm 8 8 VD_29 20mm NDX 3 3 VD_29 20mm ND9203 5 7 100mm 10 10 40mm 3 4 40mm 8 10 VC_40 80mm ND9206 8 10 VD_37 20mm NDX 3 3.5 VD_37 20mm ND9203 9 11 100mm 10 11 40mm 3.5 4 40mm 11 16 120mm 11 12 50mm 4 5 50mm ND9206 7 8 VC_50 100mm

MHZ

point L (mm) Gripping point L (mm) MHS MHZJ2-10D/11-MHZ2-10D External Grip MHZAJ2, MHZJ2, 11-MHZ2 MHC 20 Gripping force (N) Pressure 0.7 MPa Pressure 0.7 MPa MHT 15 0.6 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa 0.2 MPa 0.5 MPa MHY 10 0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

MHZ

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

Programless Controller Series LECP1

Cable length (L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) 15 20 Actuator side Controller side (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112