33

W: 800 [W] w Derive the heat generation amount from the power supply output.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Compact Electric Actuator Series LG1

P Ground ball screw Rolled ball screw Sliding screw S N Table 1: Feed Screw and Stroke Combination Correspondence Table Stroke (mm) Model 500 600 700 800 900 1000 1200 100 200 300 400 LG1H212PAStroke Screw combination LG1H212NAStroke LG1H212PCStroke LG1H212NCStroke LG1H212SCStroke Please note that combinations other than those shown above cannot be produced.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

Compact Cylinder

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Built in magnet Nil S n 2 pcs. 1 pc. n pcs.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 11 - LECSC LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter Para. No.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 20.4 22.5 24.6 26.7 28.8 33.0 37.1 41.3 47.6 1.0 Additional weight with lock [kg] -5- 1.2 Motorless 1.2.1 How to order L E J S 100 N B 500 T X400 Motor type Stroke [mm] Lead [mm] N Motorless 200 200 H 50 to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

Air-hydro Unit

bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

IR1000/2000/3000

0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-11 11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless cyinder, low profile guide type Nil S n 2 pcs. 1 pc. n pcs.

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

Sine Rodless Cylinder Series REA

0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32 20 Load weight W (kg) REA25 10 1 100 200 300 Maximum speed U mm/s 3 Series