5 Port Solenoid Valve, Series VQC

A 23 6 Station 8 11 SOL. B 24 19 12 25 C6 (EXH port) 6 One-touch fitting 13 COM 13 Connector terminal no. Standard manifolds are for double wiring, but mixed wiring (single and double wiring) can be specified as options.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS15-10 S SS ZZ Z 10 77.5 96.5 25 20 87.5 106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

HRX-OM-Y098

(This is a wiring example.) 14 1 13 25 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

CG5-S

8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80 87.2 57

Plate Cylinder with Lock Series MLU

Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

Magnetically Coupled Rodless Cylinder

mm) 15 20 25 32 40 Kits no.

Fieldbus System

Parts Description Dimensions Series SV (IP67) End Plate Unit to supply power to the EX600 system P. 2 P. 8 P. 10 P. 11 How to Order Specifications Parts Description Dimensions P. 25 Handheld Terminal Series S0700 (IP40) Parameter setting and I/O monitor tool P. 2 P. 8 P. 9 P. 11 How to Order Specifications Parts Description Dimensions P. 33 Accessories Series VQC (IP67) Options

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

mm) 15 20 25 32 40 Kits no.

Stainless Steel 316 Fittings

KFG2V0122-N01 KFG2V0122-N02 KFG2V0325-N01 KFG2V0325-N02 KFG2V0704-N01 KFG2V0704-N02 KFG2V0906-N01 KFG2V0906-N02 KFG2V0906-N03 KFG2V1163-N02 KFG2V1163-N03 KFG2V1163-N04 KFG2V1395-N02 KFG2V1395-N03 KFG2V1395-N04 Applicable tube 12 14 12 14 12 14 12 14 19 14 19 22 14 19 22 11 19 11 19 16 25 23 31 45 38 51 75 46 59 83 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 16.1 19.8 16.1

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2

HRX-OM-W060

Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

Rotary Table/Rack & Pinion Style Series MSQ

How to Order Specifications 11 MSQ 10 B A90 A S Particle generation grade Grade 1 Note 1) Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Clean series Vacuum type Number of auto switches Note) Please refer to Pneumatic Clean Series catalog for further details.

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

Rotary Clamp Cylinders

Hexagon wrench key Wrench Arm (Nm) Proper tightening torque 4 to 6 8 to 10 14 to 16 106 to 127 Bore size (mm) 20, 25 32, 40 50 63 22 Series MK2T Dimensions: 20, 25 2 x 6.6 17.5 14 C A 51 35 7 8 B 16 11 to 22 M6 x 1.0 Head End Flange (mm) C B A Model MK2TG20 MK2TG25 48 39 60 52 42 64 M8 x 1.25 Thread length 11 4 x 5.4 through 2 x 4 x 9 counterbore depth 7 2 x M5 x 0.8 5.5 S B 12 C A 10 0.07

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

Modular/F.R.L. Units Series AC

2.8 104 85 24.5 31 20 27 4.5 5.5 12 127 30 3.2 141 123 29 43 24 33 5.5 7 14 161 160 41 4 194 166 186 41 57 35 7 7 14 161 160 41 4 194 166 186 41 57 35 7 9 18 195 194 50 4 226 200 220 48 75 40 9 9 18 195 194 50 4.6 226 200 220 48 80 40 9 11 20 272 271 70 6.4 303 276 296 60 96 50 11 11 20 287 286 70 6.4 318 292 312 60 96 50 11 11 20 288 287 70 6.4 319 293 313 60 101 50 11 Note) For