Microspeed Cylinder Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi
Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most
(Schedule 40) 1/2 INCH 3/4 INCH 1 INCH 1-1/4 INCH CFM Free Air 1-1/2 INCH 80 PSI 125 PSI 80 PSI 125 PSI 80 PSI 125 PSI 80 PSI 125 PSI 80 PSI 125 PSI 10 0.45 0.30 0.11 0.08 0.04 0.02 20 1.75 1.15 0.40 0.28 0.15 0.08 30 3.85 2.55 0.90 0.60 0.30 0.20 40 6.95 4.55 1.55 1.05 0.45 0.30 50 10.50 7.00 2.40 1.60 0.75 0.50 0.18 0.12 60 3.45 2.35 1.00 0.70 0.25 0.17 70 4.75 3.15 1.35 0.90 0.35 0.23
(Schedule 40) 1/2 INCH 3/4 INCH 1 INCH 1-1/4 INCH CFM Free Air 1-1/2 INCH 80 PSI 125 PSI 80 PSI 125 PSI 80 PSI 125 PSI 80 PSI 125 PSI 80 PSI 125 PSI 10 0.45 0.30 0.11 0.08 0.04 0.02 20 1.75 1.15 0.40 0.28 0.15 0.08 30 3.85 2.55 0.90 0.60 0.30 0.20 40 6.95 4.55 1.55 1.05 0.45 0.30 50 10.50 7.00 2.40 1.60 0.75 0.50 0.18 0.12 60 3.45 2.35 1.00 0.70 0.25 0.17 70 4.75 3.15 1.35 0.90 0.35 0.23
11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.
A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L
A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L
ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS L1 L2 L3 75 86 97 108 141 119 130 152 100 112.5 125 125 162.5 137.5
Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !
LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.
Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most
D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8
D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8
171 185.5 212.5 223 10 159.5 174 200 210.5 9 148 162.5 187.5 198 8 136.5 151 175 185.5 7 125 139.5 162.5 173 6 113.5 128 150 160.5 5 102 116.5 137.5 148 4 90.5 105 125 135.5 3 79 93.5 125 135.5 2 67.5 82 112.5 123 1 56 70.5 100 110.5 L1 L2 L3 L4 585 5 Port Solenoid Valve/Plug-in Unit 10-SQ1000 Kit (Serial transmission unit) S Directional Control Valves Air Grippers Modular F.
Positioning distance (mm) 1 10 100 300 600 0.5 1.4 10.4 30.4 60.4 10 0.5 0.6 1.5 3.5 6.5 100 Speed (mm/s) 0.5 0.6 1.3 2.9 5.3 125 0.5 0.6 0.9 1.7 2.9 250 Values will vary slightly depending on the operating conditions.
L3 232 216 200 184 168 152 136 120 104 L4 14 16 11.5 13.5 15 17 12.5 14 16 (mm) 20 423 412.5 392 15.5 19 18 17 16 15 14 13 12 11 Stations L1 398 385.5 373 360.5 335.5 323 310.5 298 273 L2 387.5 375 362.5 350 325 312.5 300 287.5 262.5 L3 376 360 344 328 312 296 280 264 248 (mm) L4 11 13 14.5 16.5 12 13.5 15.5 17 12.5 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136
No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 114688 32768 65536 Electronic gear denominator *3 PA07 1 250 125 125 125 250 125 125 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032)/ 0003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors side ) (+Counter motors side
For details, refer to page 8-30-32. 8-20-11
12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5 9.5 9 12 B 8 8.5 10.5 11.5 15.5 Hs 24.5 26 29 33 38.5 45.5 Hs Hs 22 24 26.5 30.5 36 43 A 7 6.5 8 10 9.5 12.5 20 25 32 40 50 63 20 25 32 40 50 63 32.5 35.5 39 44.5 51.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 514 Auto Switch Mounting MGPW Series Minimum Stroke for
Note 3) The Z phase first detecting position from the stroke end of the motor side. 11-LEFS40;;-200-; 11-LEFS40;;-200B-; 11-LEFS40;;-300-; 11-LEFS40;;-300B-; 11-LEFS40;;-400-; 11-LEFS40;;-400B-; 11-LEFS40;;-500-; 11-LEFS40;;-500B-; 11-LEFS40;;-600-; 11-LEFS40;;-600B-; 11-LEFS40;;-700-; 11-LEFS40;;-700B-; 11-LEFS40;;-800-; 11-LEFS40;;-800B-; 11-LEFS40;;-900-; 11-LEFS40;;-900B-; 11-LEFS40;;