Escapements Series MIW/MIS

KB JB JA KA LB LA ME MD LC MA MB MC N P PA 19 29 19 29 39 20.5 30.5 40.5 47 67 47 67 PB PC HE HD HC Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 2 20 30 28 38 48 32 42 52 55 75 64 84 14 3 4 5 3 14 7.5 9.5 7.5 8 4.5 13 1.6 M2 x 0.4 6.2 M3 x 0.5 M3 x 0.5 3.5 17.5 4 11.6 2.2 M2.6 x 0.45 M4 x 0.7 M5 x 0.8 11 13 5 7 4 19 11 10

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

NCM

40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12) (12) 28.5 16.5 12.5 14.5 23 19 75 3 (12) 24 14 10.5 12.5 10.5 20 16 100 (12) 21.5 12 9 11 9 17.5 14 125 19 11 8 9.5 8.5 11 15.5 12.5 150 The data in ( ) are limited by max. stroke length.

Rotary Actuator

port B port A port B port M 30 30 M5 15.5 14 5.5 (Standard) (Altered) 40 40 M5 21 20 5.5 (Viewed from the long shaft side) Symbol: C4 Applicable to single vane type only Symbol: C3 The position of the screws for tightening the actuator body is changed.

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

Series IDG

3/8 inch) Width across flats 17 M5 x 0.8 With auto drain Differential pressure type Float type With drain guide Port size A B C D E F G H J K L M N Q Model P 224 45 11 275 59 14 5.5 133 158 188 228.5 78 179.5 8.5 185 244 269 365 87 30 24 201.5 IDG3V, 3HV, 5V, 5HV IDG10V, 10HV 1/8, 1/4 263.5 7 92.5 222.5 11 102 41 35 IDG20V, 20HV 1/4, 3/8 305 IDG30V, 30HV 315 IDG50V, 50HV 161 409 464 544 121

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) S 28 28 NA 102.5 101.5 45 45 20 20 NB LB 21.5 23 WW WA WB Bore size A M4 x 0.7 D GC B F H MM GB GA C NN Z X 6 6 LC 5.5 5.5 Y 9 9 LH 14 14 LT 2.3 2.3 LX 33 33 LY 25 25 LZ 42 42 16 10 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 15 15 29.5 29.5 4 5 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 M5 x 0.8 M12 x 1.0 689 Air Cylinder CJ2 10-/1121-/22Double Foot (M):

Vacuum Unit

Do not let the gasket get caught. 11) Mount the end plate U and D with the appropriate length of tension bolts for the number of stations required. (Tightening torque: 0.75 Nm.) 12) Mount the connector for all stations to the junction box B. (Refer to ) (Engage the recess of the connector and the protrusion of the junction box B.

Compact Cylinder with Lock Series CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CRBB-OM00004

The position of the chamfered portion illustrates the conditions of actuators when B port is pressurized. Operate within the adjustment range. Size: 10, 15 Size: 20, 30, 40 11 No. Rotating Angle Adjustment Method The rotating angle can be adjusted by moving the stopper blocks (A) and (B) shown in Fig. 1. Fig. 1 shows the default position of the angle adjustment unit.

Cylinder with Lock Series MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

Programless Controller Series LECP1

side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

AIR COMBINATION

155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 3/4 AC50B-B 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 3/41 AC55B-B 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 1 1 AC60B-B 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round type Round type Metal

HRX-OM-R026

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

Air Slide Table Series MXP

Stroke: S MXP16-20B 4 x M5 x 0.8, depth 7 A H Width across flats 12 40.8 MA 10.5 24.3 17.1 14.4 11 5 M8 x 1 11 27.3 35 34 8.5 4H9 0 +0.030, depth 4 4H9 0 +0.030 , depth 4 19 6.5 A Piping port 2 x M5 x 0.8 (Plug: M-5P) 4 x M6 x 1 Pilot hole diameter 5.1 320.05 30 D B 2 x M5 x 0.8 Piping port 80.05 W 13 47 4H9 0 +0.030, depth 2 J 8 5 16.5 14.5 Section AA Mounting datum level D B 4H9 0 +0.030

MRHQ

B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

Stopper Cylinder

D-A9V D-A73 D-A80 D-F7NT D-A79W D-P3DWA Bore size (mm) A B A B A B A B A B A B A B 12 16 20 32 40 50 11 13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming