10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-7 Cooling capacity(HRS100-W-20/40/46-) 8.4.4 HRS150-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 20 20 18 18 16 16 Cooling capacity [kW] 14 14 Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0

Digital Flow Switch (Manifold type)

Nil S P W 0.5 to 4 L/min (Symbol 04) 0.50 0.49 0.50 0.48 2 to 16 L/min (Symbol 20) 1.79 1.21 1.38 1.05 5 to 40 L/min (Symbol 40) 4.57 3.11 2.42 2.04 Flow range: 0.5 to 4 L/min (symbol 04) Flow range: 2 to 16 L/min (symbol 20) Flow range: 5 to 40 L/min (symbol 40) -52No.PF-OMW0004-B Flow rate characteristics for several supply units Flow range: 0.5 to 4 L/min (symbol 04) (reference value)

Modular F.R.L. Units

IS10M-30-A Y310-(01)-A 02-A G36-10-01 G36-4-01 G36-10-01-L G36-4-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Attachment Round type (with color zone) Spacer Spacer with bracket Y400-A Y400T-A AKM4000-(02)-A 03-A IS10M-40-A Y410-(02)-A 03-A 02A VHS40-03A 04A 02-A E400-03-A 04-A 06-A 02-A IS10E-4003-A 04-A 06-A Y44-02-A 03-A Y500-A

HRX-OM-T002

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

HRX-OM-Q026

Chapter 8 Documents 8.4.8 HRSH200-W-20/4030 Facility water temperature: 32 oC 25 Cooling capacity [kW] 20 Facility water temperature: 40 oC 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-14: Cooling Capacity (HRSH200-W-20/40-) 8.4.9 HRSH250-W-20/4035 Facility water temperature: 32 oC 30 25 Cooling capacity [kW] Facility water temperature: 40 oC 20 15 10 5 0 5 10

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40

Soft Start-up Valve

SI units: MPa Z Name plate and pressure gauge in imperial units: psi *1 *1 *1 *1 *1 Only for the NPT thread -18- AV L 20 00 02 B A Manual operation AV L 20 00 02 B 1 D A with solenoid valve Lockout type Symbol Description Body size 20 30 40 50 NIL Rc Thread type N NPT F G 02 1/4 03 3/8 Port size 04 1/2 1(P), 2(A) 06 3/4 10 1 a Mounting NIL Without mounting option B With bracket Option b

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Industrial Filters

840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 18 26 21.5 12

reduces flow setting time

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Operating Fluid and Ambient Temperature Tightness of Valve (Leakage Rate) Seal material Leakage rate Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Note) Non-leak, Medium vacuum 106 Pam3/sec or less Power source Air Nil, G V, M 10 Note) to 60 10 Note) to 40 1 cm3/min or less NBR, FKM 10 Note) to 80 10 Note) to 60 20 to 60 20 to 40 AC DC Note) Value

Compact and Lightweight

40 40 40 40 20 Suction flow rate 10 20 20 20 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 25 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Supply pressure [MPa] Suction flow rate [L/min (ANR)] ZH10SA ZH10LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 100 100 100