2/3 Port Valve

OAlowable voltage fluctuation is 10% of the rated voltage. Power consumption W (Holding) Freq. Hz 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 60 40 60 AC DC AC DC 60 60 40 60 60 Apparent power VA Model Power Max. Inrush Holding Note 1) Differ from the operating condition of pressure. Note 2) Value on option "V", "R", "Y" (Nonleak, Vacuum). (1) 10 (1) 5 AC 20 10 Min.

Table of Contents

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

Dual Rod Cylinder Series CXSJ/CXS

8 16 4 30 18.5 80.5 94 16 56 10 DZ Symbol Stroke -X 10, 20 30, 40, 50 75 100 Bore size (mm) 15 20 25 32 25 35 45 55 Individual -X 30 40 60 60 30 40 60 60 40 50 70 70 557 Series CXSJ Auto Switch Proper Mounting Position for Stroke End Detection CXSJ6, 10 Auto switch model Bore size Operating Range B D (mm) 6 5 10 6 15 6 20 7.5 25 8 32 9 D-A9, D-A9V D-M9, D-M9V D-M9A, D-M9AV D-M9W, D-M9WV

Air Cylinder Series CM2

9 34 30 60 75 30 14 10 32 32 52 36 108 116 118 40 25 40 55 20 21 Up to 300 Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8

CATALOG VC10

DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G 120 60 58 3 AF 16 P Lead

TABLE OF CONTENTS

Low Temp Range -40 to -65 F. +10 to -10 F. -40 to -65 F. -40 to -60 F. High Temp. Cont. +230 to +240 F. +325 to + 350 F. +230 to +240 F. +250 to +300 F. Duty High Temp. Int. +25 to +300 F. +425 to +450 F. +260 to +280 F. +350 to +400 F.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For complex arrangements, specify them on the manifold specification sheet. 104 Body Ported 10-SY3000/5000/7000 Type 60 Manifold Specifications Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations A, B port location 10-SS5Y5-60(-Q) 10-SY560 10-SS5Y3-60(-Q) 10-SY360 10-SS5Y7-60(-Q) 10-SY760 Stacking type/DIN rail mounted Common SUP/Common EXH 2 to 20 stations Note 1) Valve P

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

External Grip Internal Grip MHS2-16D MHS2-16D 30 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 20 20 0.4MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 10 0.2 MPa 0.2 MPa F 0 0 5 5 10 10 20 25 25 30 30 15 20 15 F Gripping point L (mm) Gripping point L (mm) MHZ MHS2-20D MHS2-20D 60 60 MHF Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) MHL

e

Load Mass Allowable Moment E-MY2H/M1 E-MY2H/M3 E-MY2H/M2 E-MY2H/m3 60 60 50 60 60 50 50 50 40 40 30 30 30 30 q r w et 20 20 20 20 Load Mass (kg) Moment (NNm) Moment (NNm) Moment (NNm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 MY2H16 4 4 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400 500 1000 1500 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200

Step Motor Controller

side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

Air Cylinder Series CA2

(mm) DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. 40 CA2-B04 +0.058 0 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 50 CA2-B05 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 63 +0.070 0 CA2-B06 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 80 +0.084 0 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 CA2-B10 93 60 16.5 100

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

SYJ300/500/700

N.O. 10-SYJ522M Base mounted (With sub-plate) 10-SYJ514M 65(51) 1/8 61(47) 60(46) 82(68) 10-SYJ524M Note) Value for DC.

Combination Cylinder

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 8 +0.036 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 5.5 5.5 6.6 6.6 31 37 38.5 42.5 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Rated voltage Note 1) 1 2 3 4 5 6 7 8 J Coil insulation type Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz For VX21: VX021N-10 For VX22: VX022N-10 For VX23: VX023N-10 Nil H Class B Class H DIN terminal or DC not available. Note 1) Refer to the table (1) for the available combinations.

Air Cylinder Series MB

60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 Y-04MNote 1) 50 12.5 Y-05MNote 1) 64 16.5 Y-08MNote 1) 80 23.5 Y-10MNote 1) 80 23.5 Y-12MNote 2) 119 28.5 Note 1) A pin

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Proposals for Energy Saving

DC 99 100 60 40 40 60 80 60 -10 Note 2) 60 40 1 AC DC AC, DC Note) Surge voltage suppressor is attached to the lead wire. Maximum Minimum -10 -5 Note 3) Note 1) D.E.N.P., etc., inside ( ) indicate option codes. Note 2) Dew point is -10C or below.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { } Exhaust center 50 60 Note) For AC Pressure center With light/surge voltage suppressor Push-turn locking slotted type P. 283 DIN terminal 10-SYJ5000 0.83 4/2 5/3 (A/B EA/EB) Push-turn locking lever type { } (10-SYJ5000, 7000 only) P. 311 10-SYJ7000 M8 connector 2.9 4/2 5/3 (A/B EA/EB) { } P. 342 Note) All AC voltage