VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

New

B 0.03 60 50 40 0.02 VXFA24A VXFA24A 30 0.01 20 10 0 0 500 0 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm) Piping length to the pilot valve (mm) 0.05 100 90 0.04 80 Start-up speed (MPa/msec) ON response time (msec) VXFA28B VXFA26< VXFA27B 70 0.03 60 50 VXFA26< 0.02 40 VXFA27B 30 VXFA28B 20 0.01 10 0 0 0 500 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm)

LEC-OM069xx

For details, refer to 8 MECHATROLINK-II Commands. 10-30 10 List of Parameters (contd) Parameter Name Setting Units Factory When Classification Reference Size No.

Compact Cylinder/Guide Rod Type Series CQM

Mounting Bolt for CQM/Without Auto Switch Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQMB125 -10 -15 -20 -25 -30 CQMB165 -10 -15 -20 -25 -30 CQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB255 10 15 20 25 30 35 40 45 50 CQMB325 10 15 20 25 30 35 40 45 50 75 -100 CQMB405 10 15 20 25 30 35 40 45 50 75 -100 CQMB5010 15 20

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Air Cylinder

Bore size Standard Stroke 1.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 Auto switch capable 2, 2.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28, 30 How To Order NC D A1 B 150 0400 A XC9 Auto Switch Mounting Bore Stroke Adjustment Range A: 0~1 B: 0~2 Adjustable Stroke Retract Dimensions Y P + Stroke LF + Stroke WF (2)EE

C95

RT T V VA VB 4 4 5 9 11.5 17 164 182 195 224 259 289 260 290 333 362 431 471 6 6.5 8 8 10 10 37 41.5 47.5 55 61 68 4 4 5 5 5 5 4 4 6 6 8 8 4 4 4 4 4 4 17 19 24 24 30 30 6.5 9 10.5 12 14 15 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 13 14 15.5 16.5 19 19 6.5 8 9 8.5 10.5 10.5 32 40 50 63 80 100 26 30 37 37 46 51 34 39.5 47 55.5 61.5 69.5 15 17 24 24 30 32 10 13 16 16 21

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 7 Model

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

HRX-OM-S004

)10 30 600 seconds AL20 Memory error AL21 DC line fuse cut Circulating fluid discharge temp.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

LS + Stroke Z (mm) 4 4 4 4 LC 7 7 6 6 LD 30 25 22 20 LH 3 3 3 3 LT 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 60 69 69 69 LS 54 44 36 32 LX 187 175 173 163 ZZ 10 10 10 10 W 71 58 49 44 LZ Z Bore size 63.5 53 52 47 38.5 34 40 32 25 20 54.5 45 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67

IDU/IDF

Dust proof filter set (A) (25) (25) (B) (10) Part No.

39

0 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 250.05 9 through 9 through H 300.025 300.025 I M61.0 H M61.0 150.03 150.03 I R45 500.05 6.5 6.5 18 10 30 3 10 3 18 R6 R6 R25 R25 19 19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA236M ACA237M ACA238M NAAMS code ACA246M ACA247M ACA248M A B C D E F G H I A B C D E F G H I Part no.

MHZ2/MHZJ2

40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa 30 30 0.4MPa 0.3MPa Internal gripping 0.5MPa 0.4MPa 0.5MPa 0.6MPa

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100