Series LX Construction and Mounting

Stepper motor Photo micro sensor Motor 12 1 Lock nut 2 Rolled screw Alloy steel 13 Carbon steel Black zinc chromated Stopper nut 3 Resin Nut 14 Aluminum alloy LX Bumper bolt Coupling 4 Bearing steel 15 Nickel plated Bumper Resin Bearing 5 16 Aluminum alloy Resin Motor cover Body 17 6 Anodized Tension ring Mounting plate Mild steel Stainless steel 7 Nickel plated 18 Ball bushing Cable

Vacuum Pump, HP 1/2 hp, Displacement 1.2 cfm, End Vacuum 0.05 torr, NPT Inlet 3/8 in, Voltage 115, Amps AC 3, Overall Length 18 in, Overall Height 18 in, Overall Width 9 in, 60 Hz, 1 Phase, Weight 50 lb, Max. dBA 55, Application For Schlenk Line Drying Manifolds, Vacuum Ovens, Freeze Dryers Up to 6L, Centrifugal Concentrators

Flow Sensor Series PFMV

Settable range: 0.7 to 5.10 V Minimum unit setting: 0.01 V When using one-touch fitting, KJL04-M5 34.4 mm 10 mm Series PFMV3 Mass: 10 g Mass: 10 g Connectors Easy connection and removal of wiring 18 mm Power supply / Output connector Flexible cable Measurement flow range (l/min) Model PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 e-con connector Sensor

Air Suction Filter

Model Symbol Port size A B ZFA100 1/8 18 ZFA200 1/4 20 28 -8- 2) Manifold Model Symbol Port size A B ZFA100 1/8 19 18 ZFA200 1/4 24 28 Model Symbol Single unit Note) Number of manifold stations 2 3 4 5 6 7 8 9 10 L1 38 56 74 92 110 128 146 164 182 200 ZFA100 L2 50 68 86 104 122 140 158 176 194 212 L1 48 76 104 132 160 188 216 244 272 300 ZFA200 L2 60 88 116 144 172 200 228 256 284 312 Note

OML0002-C

Outline Dimensions 18 7. Maintenance 7-1. Precautions for maintenance 19 7-2. How to maintain electrode needle 20 2 - 1. Safety instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LMU100/200 Series Mist Spray Unit

1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18

Booster Relay Series IL100

Preparation Equipment Industrial Filters Piping Materials Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18

Lock-Up Valve IL201/211/220 Series

211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18

0.01

x 8 Detection port 19 Rc, NPT, G 1/8 Terminal block box wiring diagram For the bracket mounting position, refer to page 877. (21) Seal conduit entry With DIN rail L1 60 3 38 L2 38 5 Terminal block box LED level meter End plate L EXH port End plate R 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18

Nozzle Type Ionizer

2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 12 26 (7.5) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (92

99

Note 2) Resistivity recovery: time taken to recover to 18 Mcm with ultrapure water. Note 3) See How to Order below for items represented by .

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

Manifold Regulator ARM1000/2000 Series

is recommended, depending on the situation. 752 Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-34

AS-FPQ/AS-FPG

32.4 18 (14.3) (36.4) (31.4) 8 15.2 27.5 20.5 34.6 20 20 4 10.4 26.8 17 33 33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12 20.9 34.8 46.3

Safety Speed Control Valve (SSC Valve) Series ASS 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-15-1 2 Series ASS System Circuit Prevents accidents caused by sudden cylinder rod extensions If pressure is applied only to one side of the cylinder, the rod could get out of control, leading to

AS-FPQ/AS-FPG

32.4 18 (14.3) (36.4) (31.4) 8 15.2 27.5 20.5 34.6 20 20 4 10.4 26.8 17 33 33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12 20.9 34.8 46.3

BP1000

Parts Material S 316L SS secondary remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18

Two Hand Control Valve

3 Component Parts No. 1 2 3 4 5 6 7 8 9 Description Description Material Aluminum die-cast Aluminum die-cast Rolled steel Aluminum alloy Brass Aluminum alloy Aluminum alloy Aluminum alloy Brass Material Stainless steel H-NBR Stainless steel Note Note Urban gray Urban white Nickel plated No. 10 11 12 13 14 15 16 17 18 Cover Body Plate Spool valve Orifice Valve seat Valve guide B Valve guide

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280