30

1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

maximum allowable load mass is 1 kg. 6 CKZT -X2797 -X2798 Setup Procedure Precautions 1) There is a mechanical difference of 0 to +0.5 at the clamping end as shown in Figure 1.

MHT2

Pressure 0.6 MPa 0.4 MPa 0.2 MPa Opening/Closing angle (Both sides) 12-9-3 4 Series MHT2 Dimensions 8-M6 x 1 mounting thread Thread depth 10 (Both sides) MHT2-32D 4-M6 x 1 thread depth 10 Mounting thread Open 28 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8

MHT2

Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8 x 1.25 mounting thread Thread depth 10 (Both sides) 4-M6 x 1 thread depth 10 Mounting thread Open 27 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M8 x 1.25 thread depth 12 Mounting thread 4-M8 x 1.25

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)

Uniaxial Electric Actuator Series LJ1

2 1 2 Figure 2.

Water Regulator

INFORMATION Pressure adjustment of water line Water Regulator Model/Specifications Model WR110--X224 WR110--X215 Port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/8, 1/4 Fluid *1 Water Ambient and fluid temperature 5 to 60C (No freezing) Proof pressure 1.72 MPa Maximum operating pressure 0.8 MPa Set pressure range 0.08 to 0.39 MPa 0.05 to 0.69 MPa Pressure gauge port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/

ZSE5/ISE5

Bracket 2S-22-D With four M3 tappings Digital pressure switch Ser,"es ZSE5 115E5 for general purpose fluid 1 ' How to Order Piping Piping '---r--'I Vacuum pressure switch Positive pressure switch ZSESB L ISESB L Switch specifications t~'1'~"o", 26 Anal 3-wire L Grommct:3m specifications specifications 02 Direct plpmg R(PT)1 /4 T2 Direct pin NPTF 1/4 27 2 out ut NPN 4-wire 67 20ul ul {PNP

PVC Quick Drain Valve

Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.

Multistage Ejector Series ZL

2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Solid State Vacuum Regulator Series ITV2090/2091

B Monitor output Thread type Port size 2 0 1/4 C Without (in case of preset input) Analog output 1 to 5VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20mADC 1 2 Nil Rc NPT NPTF G Order made N Order made 3 T 4 F Order made Order made 1 Series ITV209 Standard Specifications ITV2090 ITV2091 Model 24VDC 10% 12 to 15VDC Voltage Power supply Current consumption Power

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

AU

1 e + !

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

AU

1 e + !

High Purity Fluoropolymer Needle Valve Series LVN 1

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

VHS

Do not remove the mounting screws from the handle as this may cause malfunction. t Brass Piston y Steel Spring holder Zinc chromated u Steel Parallel pin Zinc chromated i Steel Spring o Stainless steel Valve spring !0 PVC Packing JlS B 2401 P12.5 !1 NBR O-ring Piping Special !2 NBR O-ring Warning 1.