Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)

Uniaxial Electric Actuator Series LJ1

2 1 2 Figure 2.

Water Regulator

INFORMATION Pressure adjustment of water line Water Regulator Model/Specifications Model WR110--X224 WR110--X215 Port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/8, 1/4 Fluid *1 Water Ambient and fluid temperature 5 to 60C (No freezing) Proof pressure 1.72 MPa Maximum operating pressure 0.8 MPa Set pressure range 0.08 to 0.39 MPa 0.05 to 0.69 MPa Pressure gauge port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/

ZSE5/ISE5

Bracket 2S-22-D With four M3 tappings Digital pressure switch Ser,"es ZSE5 115E5 for general purpose fluid 1 ' How to Order Piping Piping '---r--'I Vacuum pressure switch Positive pressure switch ZSESB L ISESB L Switch specifications t~'1'~"o", 26 Anal 3-wire L Grommct:3m specifications specifications 02 Direct plpmg R(PT)1 /4 T2 Direct pin NPTF 1/4 27 2 out ut NPN 4-wire 67 20ul ul {PNP

PVC Quick Drain Valve

Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.

Multistage Ejector Series ZL

2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Solid State Vacuum Regulator Series ITV2090/2091

B Monitor output Thread type Port size 2 0 1/4 C Without (in case of preset input) Analog output 1 to 5VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20mADC 1 2 Nil Rc NPT NPTF G Order made N Order made 3 T 4 F Order made Order made 1 Series ITV209 Standard Specifications ITV2090 ITV2091 Model 24VDC 10% 12 to 15VDC Voltage Power supply Current consumption Power

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

AU

1 e + !

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

AU

1 e + !

High Purity Fluoropolymer Needle Valve Series LVN 1

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

VHS

Do not remove the mounting screws from the handle as this may cause malfunction. t Brass Piston y Steel Spring holder Zinc chromated u Steel Parallel pin Zinc chromated i Steel Spring o Stainless steel Valve spring !0 PVC Packing JlS B 2401 P12.5 !1 NBR O-ring Piping Special !2 NBR O-ring Warning 1.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

Series DXT474

Side Thread Type Nil Rc G NPT NPTF T F F 1 2 3 4 N.O. N.C. N.O. N.C. N.O. N.C. N.C. N.O. Manifold Type 1 0 Side Ported Top Ported Rated Voltage, Elec.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) (1) Rear flange Note1) Integral clevis Note1) Single clevis Note1) Note 3) Double clevis (1)Note2) Front trunnion (1)Note2) Rear trunnion (1) Boss-cut basic (1) Boss-cut flange (1) Boss-cut trunnion Note 1) Mounting nuts are not attached to the integral clevis, single clevis and double clevis types.