FHG

T dimension) None Differential pressure indicator Differential pressure indication switch Note) 0 1 5 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)

RLQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA (mm) CNS Bore size (mm) Extension 32 40 50 63 +36 +38.5 +47 +50 CLS W CLQ MLGP Drop prevention is possible at any point of an entire stroke. RLQ Bypass piping is standardized.

Pressure Control Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-4-11 Miniature regulator ARJ310 Small, compact Allows smaller mounting pitch Bracket Pressure gauge M5 0.2 to 0.7 1 8 / to 2 1 4 Pilot operated regulator AR425-925 AR435-935 Compact manifold regulator ARM10/11 / 14-4-15 Internal pilot type Relieving

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Option 4-16-5 2 Series VS3135/3145 Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A-A cross section Component Parts !1 Solenoid Coil Assembly Part No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VZS Part no.

CP95

3 w A @0 A' Sectional view A-A' iu Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Refer to Variations in the table below for valve type combinations.

CE

Rod side flange style Cable length 20 mm Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 3 pcs.

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Ball bushing bearings and slide bearings are standard for all series. Dimensions for ball bushing bearings and slide bearings are the same. Adjustable stroke range: 0 to 5 mm Work can be mounted on three faces.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-8-1 2 Various auto switches available Travelling parallelism: 0.004 mm Parallelism: 0.02 mm High rigidity and high precision Cylinder is built into the rail of the linear guide.

VCS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

MHL2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc. D2012-4-1 2 Parallel Style Wide Opening Air Gripper Series MHL2 Size: 10, 16, 20, 25, 32, 40 How to Order D 16 MHL 2 1 Y7BW S Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

VP4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 position single 1 2 3 4 3 position exhaust center 2 position double VZS 3 position closed center VFS Electrical entry Body style G Grommet VS4 1 1 4 Standard 3 4 Standard 5 7 TL D T Conduit terminal DIN terminal VQ7 Conduit terminal with indicator

REA/REB

Example) For REAS25-650 (1) Maximum load weight = 20 kg (2) Load weight for 650 st = 13.6 kg 13.6 (3) = = 0.68 is the result. 20 1.

A

Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

ZR

Supply port location Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Individual Spacer Part no.

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VT External non-leak Latching Negative COM AC Normally open Vacuum VP VG VP S070 VQ VKF VQZ VZ VS VFN Copper-free The fluid contacting section is copper-free and the standard style can be used as it is.

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Conforms to ISO standard 5599/I Interface conforms to ISO standard Size 1 (VQ7-6) and Size 2 (VQ7-8).

Rotary Cylinder Series MRQ Size: 32, 40 1

CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !