MXQ

piping type (S: Stroke (mm)) With end lock With buffer 10 20 30 40 50 75 100 125 150 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 25 5 5 6 10 100 120 140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 60 Suction flow 40 Air consumption 20 0 0 20 40 60 80 Suction flow [L/min(ANR)] Supply pressure [MPa] ZHP-15 ZHP-15 (Supply pressure: 0.35 MPa) 100 100 90 80 70 60 50 40 30 20 10 0 150 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 120 105

PSE100

for display (Optional) 2-4.4 mounting hole ZSE4 ISE4 1 2 3 4 5 ZSE5 ISE5 PRESSURE SWITCH ZSE6 ISE6 8 10 ZSE3 ISE3 l50 l45 l48 56 70 4.5 (MAX.8) 35.5 12.5 GS PS ISA 9 8 7 6 10 ZSE1 ISE1 17 10-M3 ZSE2 ISE2 11 23 6 38 50 ZSP 48 (54) ISl ZSM DIN rail L PFl 7.5 10 25 5 IFl 4.5 35 27 Material: Aluminum Part number of DIN rail Part number ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L 105

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

VQ7-6/7-8

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1999 D-SMC.L.A. P-77.5 (YG)

Air Slide Table Series MXQ

145 165 I 12 12 12 12 20 15 18 23 NN 2 2 2 2 3 3 4 5 H 39 39 48 58 52 44 44 G 18 18 19 19 21 36 17 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 MXQ16L10 MXQ16L20 MXQ16L30 MXQ16L40 MXQ16L50 MXQ16L75 MXQ16L-100 MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 112 Air Slide

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Air Slide Table

MXQ 12B-mZN Shorter total length type Dimensions [mm] M 3 Model M MXQ12B-10ZN 85 MXQ12B-20ZN 95 MXQ12B-30ZN 105 MXQ12B-40ZN 122 MXQ12B-50ZN 132 MXQ12B-75ZN 163 MXQ12B-100ZN 207 MXQ12B-125ZN 232 *3 As the total length has been reduced by removing the extension stroke end adjuster mounting holes, an extension stroke end adjuster cannot be mounted afterward.

Basic type / Direct mount type Series CY3B/CY3R

Inclined Operation (At a right angle to operating direction) 25 32 40 Bore size (mm) 3.4 + Lo 105 60 4.2 + Lo 200 Allowable drive resisting force (FA) (kg) 5.1 + Lo 8.

C95

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

VZ100/300/500

N.O. 105 (Without sub-plate: 75) Base mounted (With sub-plate) 1 8 Note) Weight stands for grommet type. Option Description Foot bracket Part no. DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

VQ7-6/7-8

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 x 45 with SW M6 x 18 with SW M6 x 55 with SW M6 x 85 with SW M6 x 100 with SW M6 x 105 with SW M6 x 125 with SW M6 x 140 with SW M6 x 145 with SW M6 x 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Process Valve Series VNA

DL) K (Terminal with indicator light: DL) Pilot port 12(P1), 10(P2) L (Conduit terminal: T) Manual override (Non-locking push type) J (DIN terminal: D) I (Conduit: C) H (Grommet: G) G (Air operated) Main port (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Note) K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105

1

+1/2 stroke 105 + 1/2 stroke 129 + 1/2 stroke 129 + 1/2 stroke 94 + Stroke 96 + Stroke 108 + Stroke 105 + Stroke 130 + Stroke 217 + Stroke 95.5 + Stroke 97 + Stroke 109.5 + Stroke 106.5 + Stroke 131 + Stroke 128 + Stroke 84 90 102 105 128 131 82.5 89 100.5 103.5 127 130 With rod boot Symbol For -XC14A For -XC14B For -XC14 Reference Standard (Center trunnion) Bore size (mm) Minimum Maximum

LJ1H

With brake: 148 Without brake: 118 Housing With brake: 135 Without brake: 105 29 24.6 Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

SMC

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

Pressure switch for energy-saving control ejector with N.O. type valve

(The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.

Digital Flow Switch (Remote type monitor unit)

PFM510 PFM525 PFM550 PFM511 Set flow range -10.5 to 10.5 L/min -26.3 to 26.3 L/min -52.5 to 52.5 L/min -105 to 105 L/min -34No.PF-OMJ0018-F [F 8] Display resolution This function is only available for the 10 and 100 L/min types. The minimum setting unit can be changed by selecting the display resolution.