PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Port size: (inch) Output specification 11 13 19 PF2D504 PF2D520 PF2D540 3/8 1/2 3/4 Specification PF2D200/300 series PF2D300 series Symbol 1 2 Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Refer to page 23 for details. 10 15 20 Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 3) on page 11. Side holder !1 Controller/Driver type1 !2 I/O cable length [m]1 !

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

LQ1 Material LVN Applicable option Actuator section Diaphragm Body Note Symbol 1 2 3 4 End plate PPS TL/TIL Nil PFA PTFE Applicable tubing size Hydrofluoric acid compatible (Only LVC40, 50 type) Port B (OUT) different dia. size F PVDF Body class PFA PTFE PTFE LQ3 Connecting tubing O.D.

KK

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 167

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47

How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications Nil None 10 For positive pressure Q CE-compliant 11 For vacuum and residual pressure ฀The PS1200 series is CE- 12 For vacuum compliant (with Q) only. Piping specification

RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Nil Q None CE-compliant Output specifications 10 11 12 For positive pressure For vacuum and residual pressure For vacuum The PS1200 series is CEcompliant (with Q) only.

SYJ300

(For details, refer to page 4-4-11.) 4-4-6

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Ambient and fluid temperature (C) 0 to 60 Lubrication (1) Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32). Note 2) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF.

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Note 3) Solenoid valve: Max. 50 oC Note 4) Synthesized effective area with 2 position single style solenoid valve. Note 5) Supply pressure to interface regulator only from P port except when it is used with reverse pressure style valve. Use the ARB210 or ARB310 model to combine a pressure centre valve and the A and B port pressure reduction of a spacer style regulator.

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, FA, VNA/B/C/D

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 100 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 200 lb

Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), Process valve, 2 PORT PROCESS VALVE, J07, 300 lb