SL5200

0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0.28 40 0.24 35 4 Delivery pressure (MPa) Delivery pressure (psig) 1.0 (25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature

New

30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

30 Center 20 20 *1 This controls the speed of the slave axis when the speed of the main axis drops due to the effects of an external force and when a speed difference with the slave axis occurs.

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

Shock Absorbers and Rate Controls

resred lIr) flor. l{rn/rytle (lloloq l{0. tt odell OEtl l ,5lllx l 20 25.0 0.3.3.J 260 126,000 t3,000 19 58 2,890 0.9 lR0tl.5lltxl 20 25.0 0.08-t.3 260 t26,000 13,000 49 68 6,660 0.9 Offll.5Xtx2 20 50.0 0.3-3.5 520 167.000 t3,000 JI 68 2,890 1.0 tR0tXll.5ltlx2 20 50.0 0.08-1.3 520 1o,000 r3,000 49 80 6,660 L0 0tlSl.5flr3 20 75.0 0.3-3.5 7S0 201,000 ,000 32 80 2,890 1.2 0IIlt2.0tltx2 30 50.0

Heavy Duty Stopper Cylinder

MIW MIS 40 30 20 3.

One-touch Fittings Series KQ2

D1 D2 L M A Nylon Urethane M5, M6 KQ2S04 to 12 KQ2S16 M5 0.8 M6 1.0 KQ2S04-M5 KQ2S04-M6 KQ2S04-01S KQ2S06-M5 KQ2S06-M6 KQ2S06-01S KQ2S06-02S KQ2S08-01S KQ2S08-02S KQ2S08-03S KQ2S10-01S KQ2S10-02S KQ2S10-03S KQ2S10-04S KQ2S12-02S KQ2S12-03S KQ2S12-04S KQ2S16-03S KQ2S16-04S 2.7 2.8 8 3.3 3.4 9 15 12 11 24 18 12 19 35 23 18 30 42 34 15.6 14.1 19 16.4 15 20 20 24 19.5 21 26 21.5 21 20 27.5 22.5

48

[Nm] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.13 0.10 0.08 0.06 0.04 [kg] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.9 0.7 0.5 0.4 0.2 16 (12 x 2) 0.14 0.11 0.09 0.07 0.04 16 (12 x 2) 0.9 0.7 0.6 0.4 0.2 20 (16 x 2) 0.27 0.22 0.16 0.10 0.07 20 (16 x 2) 1.3 1.0 0.8 0.5 0.3 25 (20 x 2) 0.54 0.45 0.34 0.21 0.15 25 (20 x 2) 2.3 1.9

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Vacuum Pad

4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Lightweight and Compact

min 30 s 20 s Max.

VQ7-6/7-8

Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector Type Metal seal type Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R VQ7-8-FG-DVQ7-8-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-8-DVQ7-8-D-R VQ7-8-FPG-DValve replacement parts FHG FJG

7

30 17 17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Support Guide/11-LEFG Series

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.