LEF-OM002xx

60 B A 50 H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [

HRX-OM-M005

BAND TEMP SP READY TIME TEMP PV TEMP READY display/output TEMP READY not display/not output Figure 8-7 BAND/READY Function Examples of Setting TEMP SP: 20C BAND: 2C READY TIME: 60 sec. RDY is displayed on the operation touch panel 60 sec. after TEMP PV value becomes 18C to start output by communication. Necessary condition is that TEMP PV value after 60-sec. is 20+/-2.0C or less.

CG1

CS1 Trunnion (mm) Stroke range Bore (mm) TV TT TS TR TH TF B TDe8 TE Front Rear 0.025 0.047 0.025 0.047 0.032 0.059 0.032 0.059 0.032 0.059 0.032 0.059 20 25 32 40 50 63 3.2 3.2 4.5 4.5 6 8 28 33 40 49 60 74 39 43 54.5 65.5 80 98 25 30 35 40 50 60 5.5 5.5 6.6 6.6 9 11 Up to 200 Up to 200 8 10 12 14 16 18 35.8 39.8 49.4 58.4 72.4 90.4 38 45.5 54 63.5 79 96 10 10 10 10 20 20 Up to 300 Up to

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa 0.5MPa 60 60 Holding force (N) Holding force (N) 50 50 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 30 30 0.2MPa 0.2MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Holding point L (mm) Holding point L (mm) 2.3-6 Series MHR2/MDHR2 Construction MHR2 !

VQ7-6/7-8

Hz 200 VAC, 50/60 Hz 24 VDC 12 VDC Other Nil SB None With 10 10 stations VF Note) When equipped with control unit, 1 or 2 stations are used for mounting.

Plug-in/Plug Lead: Single Unit

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

Compact Vacuum Ejector Series ZA

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

Air Slide Table Series MXW

490 6 63 34 MXW25-200 142 275 155 225 60 540 6 88 59 -X MXW25-225 165 305 175 245 55 55 590 7 113 84 1 MXW25-250 187 335 200 275 60 67 640 7 138 109 1 Individual -X MXW25-275 210 360 225 300 65 80 690 7 163 134 1 MXW25-300 232 395 245 320 60 52 60 740 8 188 159 2 165 Series MXW Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90 (V), D-A93 (V), D-A96

Clamp Cylinder Series CK1

60 Material: Cast iron Material: Cast iron Unit: mm Part no.

Clamp Cylinder with Lock

25 45 60 A Part no.

Vacuum Equipment

-60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Lifting force (N) Lifting force (N) How to read the graph Example: Workpiece weight 1 kg (Lifting force: 9.8 N) : Conditions/Number of pads: 5 pcs.

SY

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 233 Series SY3000/5000/7000/9000 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 230 through 233 for safety instructions and common precautions.

ZPT/ZPX

X: Not suitable Characteristics Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Oil resistance benzol Oil resistance gasoline Operating temperature range (C) Material Durometer HS (5) NBR 0 to 120 X 50 X X X 50 Silicon rubber 30 to 250 X X X X X Urethane rubber 0 to 60 60 X X X X X 60 Fluoro rubber 0

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

VS7-6

SQ Pilot Valve/Spacifications AXT511C-4 (V) AXT511C-1 (V) AXT511C-2 (V) AXT511C-3 (V) AXT511C-4 (V) 24V DC 12V DC AXT511C-1 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.02 0.015/0.01 Part No.

Compact Cylinder

(mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQB5010 CVQB325 M6 x 60L M5 x 45L 60 45 15 10 x 60L x 45L 60 45 20 15 x 65L x 50L 65 50 25 20 x 70L x 55L 70 55 30 25 x 75L x 60L 75 60 35 30 12.5 x 80L x 65L 80 65 9 40 35 x 85L x 70L 85 70 45 40 x 90L x 75L 90 75 50 45 x 95L x 80L 95 80 75 50 x 120L x 85L 120 85 -100 75 x 145L x 110L 145 110 CVQB6310

Modular Type Air Filters Series AF

-X425 Environment Proof pressure (MPa) Low temperature High temperature 3.0 Ambient temperature (C) Maximum operating pressure (MPa) 30 to 60 5 to 80 2.0 Fluid temperature (C) Ambient and fluid temperature (C) 5 to 60 (with no freezing) 5 to 60 (with no freezing) Rubber parts Special NBR FKM Applicable Model Material Main parts Metal (Aluminum die-cast, etc.)

Rotary Actuator/Vane Style Series CRB1

LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 56 63 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on the actuator at