A-HEC-OM-J004

Maintenance . 6-1 6.1 Before returning the product . 6-1 Chapter 7 Appendix . 7-1 7.1 Outline Dimensions . 7-1 7.1.1 Liquid Tank .7-1 7.1.2 Controller.7-1 TOC-2 A_HEC-OM-J004-4 Table of Contents 7.2 Specifications . 7-2 7.3 Specifications of Connectors . 7-5 7.3.1 Connection of Liquid Tank and Controller . 7-5 7.3.2 Connection of Power Supply Cable . 7-6 7.3.3 Connector for External Equipment

AIR COMBINATION

N.C. type is recommended. 18 6.

MHF2

6 Parts list Parts list Note Material No. Description No.

180° Angular Style Air Gripper Series MHY2/MHW2

= 9.0 x 10-6 (kgm2) Moment of inertia around Z axis = Z1 m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis Z2 = {m2 (d2 + e2)/12} x 10-6 Z2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) B = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) = 9.0 x 10-6

VZ5000

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3

Cylinder with Lock Series CLS

(n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 90 95 D-M9AVL 95 + 30 (n2) 2 (n = 2, 4, 6, 8) 15 + 30 (n2) 2 90 + 30 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F 2 pcs.

New

Stainless steel E 230 VAC 6 D K L N.C. N.O.

ZQ-OM01301

Note 3) (6) and (7) do not need to be selected. 7 - Doc. No.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

6 !6 Component Parts Description Material Description Material No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

6 !7 !

EXxx-OMO0027

Content of diagnosis 0 There is an error in Slot 0. 1 There is an error in Slot 1. 2 There is an error in Slot 2. 3 There is an error in Slot 3. 4 There is an error in Slot 4. 5 There is an error in Slot 5. 6 There is an error in Slot 6. 7 There is an error in Slot 7. Unit diagnosis byte1 Bit No.

HRX-OM-R028

Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.

CJP2-OM0002K

Part number of auto switchD-A9D-A9V Unitmm B A (When detecting retracted stroke end) H H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 6 1 6 11 16 21 26 13.0 10.0 20.0 10 1 6 11 16 21 26 31 36 41 16.0 9.5 19.0 16 1 6 11 16 21 26 31 36 41 18.0 12.0 24.0 Part number of auto switchD-M9D-M9VD-M9WD-M9WV Unitmm B A (When detecting retracted stroke end) H

Electric Actuator Miniature Rod Type Miniature Slide table Type

Top mounting Front mounting Model Bolt Max. tightening Max.screw-in torque [Nm] depth [mm] LEPS6 M4X0.7 1.4 6 LEPS10 M4X0.7 1.4 6 Model Bolt Max. tightening Max.thread depth [mm] torque [Nm] LEPS6 M4X0.7 1.4 7 LEPS10 M4X0.7 1.4 8 40 - 6. When mounting the product, tighten the mounting screws within the specified torque range.

C95

6 !7 !8 !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Bernoulli Gripper

(Aluminum: 6.5 g, Stainless steel: 17.6 g) ZNC30 to 80: The weight value is for the basic type without a plug. *6 For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 6 ZNC Series Lifting Force ZNC20m ZNC30m ZNC40m 12 16 6 14 10 5 12 8 Lifting force [N] Lifting force [N] Lifting force [N] 4 10 6 8 3 6 4 2 4 2 1 2 0 0 0 0 0.6 0.5 0.4 0.3 0.2