CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

VXA31/32

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

G H G H G H 149.5 (3 position: 157) VK VZ 2-4.5 mounting hole Manual override (Non-locking) VF 300 (Lead wire length) VFR Pilot EXH port VP4 (External pilot port) VZS Not machined VFS VS4 3-Rc 1/8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center

Non-contact Gripper

C 16.5 L H L H 4 x M depth ML 4 x M depth ML L L 16.5 (mm) Part no.

100

Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 30 (Operating hours: 10 hours/day, Operating days: 250 days/year, 120 cycles/h, when 1 unit is used) Cost conditions *1 Air consumption 100 Peak vacuum pressure 10% reduction -84 Air consumption [L/min (ANR)] Existing model ZL112 ZL1 63 L/min (ANR) Vacuum pressure [kPa] 57 63 Approx.10% reduction Air consumption Existing model (ZL112) ZL1

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

MGC

(mm) Allowable kinetic energy (J) 70 50 100 50 100 40 20 R: 0.35, H: 0.42 R: 7, H: 7.5 25 R: 0.56, H: 0.65 R: 7, H: 7.5 100 32 Total load weight (kg) 32 0.91 7.5 100 25 40 1.8 8.7 10 50 3.4 11.8 100 20 High kinetic energy generated by large loads and high speed operations can be absorbed by compressing air at the stroke end thus preventing shock and vibration being transmitted to the machine

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

High-temperature specification: the AS□-□-H can be used from -5°C to 80°C.
Ex.) AS2000-□-H, AS3000-□-H, AS4000-□-H, AS420-□-H, AS500-06-H, AS600-10-H, etc.

Low-temperature specification: the AS-□-L can be used from -30°C to 60°C.
Ex.) AS3000-□-L, AS4000-□-L, AS5000-□-L, AS420--L, AS500-06-L, AS600-10-L-, etc.

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: NPN Output, Power Supply Cable, AC Adapter: H (e-con Connector, Power Supply Cable to be Provided & Prepared by Customer)

Option: H (High-voltage Measuring Handle)

Cooling Capacity: 030 (30 kW)

Cooling Capacity: 008 (8 kW)

Cooling Capacity: 015 (15 kW)

Cooling Capacity: 1kW, Temperature Set Range: 20°C to 90°C, Option: -

Cooling Capacity: 2kW, Temperature Set Range: 20°C to 90°C, Option: -

Cooling Capacity: 4kW, Temperature Set Range: 20°C to 90°C, Option: -