I

++t&F Eft!

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Refrigerated Air Dryers

S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. *2 The maximum operating pressure is 1.6 MPa. *3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS-D AS-T 0.4 0.3 0.2 0.3 0.2 Note 1) Flow rate values are measured at 0.5 MPa and 20C.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASQ Metric Size Inch Size A Model A Weight (g) Weight (g) d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04D AS131F-U10/32-03D 4.7 10.8 5/32" 9.3 20.3 M5 x 0.8 8 9.6 9.3 0.7 27.4 4 9.3 20.3 10 31 4.7 0.7 37.4 10.8 10-32 UNF 8 9.6 9.3 31 AS131F-M5-06D

Cylinder

Re ~ t~ur.:.: n:.' s~pr~i::ng !'...-__-I___ _ P :.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 10 XLF/XLFV Series Air Operated, With Solenoid Valve Solenoid valve How to Order [Option] w XLFV 16 2 G M9N A y 1 G q e i r t u o !

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

Air cylinder

C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2. Storage of seals C a u t i o n Store seals in sealed packaging such as polyethylene bag and place it in a box. Avoid locations exposed to direct sunlight and high temperature and humidity.

Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

rep-filter-e

Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.

VCA

Series VCA30/40 y t r e q w Series VCA30 Series VCA40 Description No. Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

FSQ seies

With locking mechanism t v"lc^ qrl# lrl AFtaS . '. rFo-+ .tE3t-*ec Leve, E P4l \ Pin :'u---) u-'/ ' \ Bracker T h 9qrEl-. s :. Lever standard position Lever lock Lock releasing . Cancel cap (mechanism to hold lever horizontallv) Series Variation ^ -" l f' -Rod erd I s*ardarc lry | "** I lT* I @'@-i*rrry o5O . ' l i i : , . , . . . ' t . ' .

RB/RBL/RBQ

S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

4/5 Port Air Operated Valve Series SYJA3000

Type 40 (5 Port/Base mounted) How to Order SS5YJ740 05 01 P port 1/4 Thread type Stations 01 1/8 A, B port size Nil F N T 02 Rc G NPT NPTF 2 stations : : R port 1/4 20 20 stations Applicable solenoid valve SYJ740SYJ743A, B port Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Electric Slide Tables

6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Industrial Filters Replacement Procedure

Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.

Air Cylinder RSQ Series Stopper Cylinder

With locking mechanism t v"lc^ qrl# lrl AFtaS . '. rFo-+ .tE3t-*ec Leve, E P4l \ Pin :'u---) u-'/ ' \ Bracker T h 9qrEl-. s :. Lever standard position Lever lock Lock releasing . Cancel cap (mechanism to hold lever horizontallv) Series Variation ^ -" l f' -Rod erd I s*ardarc lry | "** I lT* I @'@-i*rrry o5O . ' l i i : , . , . . . ' t . ' .