Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Rotary One-touch Fittings Series KS/KX

KXH10-04S KXH12-03S KXH12-04S 38.5 11 13 39 35 8 10.4 2.5 4.0 4.0 16 4 1 8 M5 0.8 M6 1.0 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68 76 94 88 14 4 13.4 10.4 8 1 4 17 18.5 15.2 18 6 26.1 18.0 3 8 R(PT) 1 4 52 10 3 8 1 2 3 8 1 2 18.5 23.5 21 7 22 36.3 29.5 53 54 55 R(PT) 12 24 20.9 8 22 26 46.1 46.1 105

SMC Pneumatic Clean Series

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

Cylinder with Lock Series CNS

E1 NX 25 + 0.084 0 28 + 0.084 0 32 + 0.1 0 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 I-12 I-14 I-16 125 140 160 33 27 46 54 100 M30 x 1.5 L1 U1 39 30 48 54 105 M30 x 1.5 39 34 55 60 110 M36 x 1.5 RR1 Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D Part No.

Compact Cylinder

95 100 105 110 115 120 125 130 135 140 145 150 Cylinder model C D 65 70 75 80 85 90 95 100 105 110 115 120 125 130 135 140 145 150 155 75 80 85 90 95 100 105 110 115 120 125 130 135 140 145 150 155 160 165 Mounting bolt part no.

Title not found

Timing Circuits Sample Components 3-Way Air Pilot MV-140 Control VAlve N2-DP Normally Closed Timer KLC-105 In this circuit, the 3-way valve is actuated and air is sent to the control valve. The control valve shifts, sending air to the rear of the cylinder causing the cylinder to extend. Air also flows to the timer where it begins to time to the pre-setting.

Title not found

Timing Circuits Sample Components 3-Way Air Pilot MV-140 Control VAlve N2-DP Normally Closed Timer KLC-105 In this circuit, the 3-way valve is actuated and air is sent to the control valve. The control valve shifts, sending air to the rear of the cylinder causing the cylinder to extend. Air also flows to the timer where it begins to time to the pre-setting.

VQ7-6/7-8

(516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override E R Residual pressure release valve spacer (AZ503-82 ) A B 65 (37) 105

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 x 4 x RT 80, 100 2 x 4 x RT BG With rod boot e d l h f h + L8 + VA + Stroke Bore size [mm] Stroke range [mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VA VD WA WB WH ZZ Without rod boot With rod boot 32 Up to 2000 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6 x 1 8 10 4 4 4 7 26 146 40 Up to 2000 Up to 1000 24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105

Cylinder with Lock

120 125 130 n (Same surface) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 120 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 125 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 130 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 D-F5NT 1 100 105 120 125 130 2 (Different surfaces, same surface) 1 60 80 105 110 115 D-A5 D-A6 n (Same surface) 60 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 55 (n 4) 2 (n =

0.5

Conductor Insulator Outside diameter 1.4 mm Blue, Brown 0.7 mm White, Green, Light green, Purple, Gray, Yellow Sheath Material Heat resistant PVC Outside diameter 6.2 mm AC adapter IZF21-CG1 (with AC cord) 98.8 2144 +105 100 1820 50 46.8 AC adapter AC cord IZF21-CG2 (without AC cord) 2144 +105 100 32.1 98.8 46.8 Inlet IEC60320-C6 AC adapter *: The input (AC) side and output (DC) side of the

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

Thermo-con/Rack Mount Type

125 139.7 38 38 0 10 0 61 0 484 447 251 38 9.5 474.5 Handle (for installing/removing the product to/from the rack) Label Ventilation hole (air inlet) Circulating fluid level gauge Power supply connector Ventilation hole (air outlet) Communication connector External temperature sensor connector Alarm output connector 104 256 289 69 Model no. label 0 129 144 144 124 118 105 0 23 0 10 Label

CNS

NDH10 125 140 160 I-12 I-14 I-16 0.1 0.3 25 32 +0.084 0 2033 27 46 54 100 M30 x 1.5 E1 0.1 0.3 28 36 +0.084 0 39 30 48 54 105 M30 x 1.5 NX 0.1 0.3 32 40 +0.100 0 Data 39 34 55 60 110 M36 x 1.5 L1 U1 RR1 Rod End Nut Material: Rolled steel 30 d Applicable bore size (mm) d H B C D Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 MGZ 1000 (1001 to 1400) 204 (215) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

Vacuum Ejector Series ZM

When ventilative or leaky work must be adsorbed, please note that vacuum pressure will not be high. 0 0 0 0 25 20 15 5 10 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM10M Exhaust Characteristics Flow Characteristics 90 90 135 80 80 120 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 105

MLGC

Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30 160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105

PC Wiring System

Dimensions 10.5 10.5 103 (3.6) 16.7 28.3 45 OD/040LP OUT RS4.1 CH 1 CH 5.1 53.5 55 (3.7) 113 0 + 1 3 2 4 7 6 5 10 9 8 13 12 11 14 15 Refer to page 50 in CAT.E02-20 for the junction cable part number. 101 100 102 104 103 106 105 109 108 107 112 111 110 113 114 115 4.5 Models Output Circuit diagram PCW-993193 PCW-993194 PCW-993225 Page 37 in CAT.E02-20 Page 37 in CAT.E02-20 Page 39 in CAT.E02

Single Axis Electric Actuator Serriies LJ1S Slider Guide

92 Standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 246.5 200 Z section detail 63.5 63 Stroke + 245 (table movement range) 31.5 221.5 Z section 110 3.3 69 113 105