Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63 e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC
Dimensions: AS2000/3000 Dimensions: AS4000 KE AS-FG 2 x 1/4 to 1/2 AS-FP 68.5 (Max.76.5) AS-FM 2 x Port size AS-D AS-T ASP ASN 2 x D AQ Dimensions Max.
set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption
Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.
VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23
(mm) 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 Burst Pressure Characteristics Curve and Operating Pressure Tubing I.D.
Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.
Intrinsically Safe Valve 5 Port Solenoid Valve Series 53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10
The use of 34 pin connectors allows up to 16 stations with double solenoids.D-sub connector or Flat ribbon cable, Tie rod base, 3000 series, Number of connectors (D-sub): 25 pins, Maximum number of stations: 20, Number of connectors (Flat Ribbon): 26, 20, 10 pins, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V3 MANIFOLD SV3000, UN, SS5V1 BUILT IN FITTING (
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10
range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10
Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode
The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain).
Product failure Replace the product. -11No.PS-OMG0004-D Specification Specifications Model No.
D-A5/A6, D-A59W Tie rod mounting D-G3/K3 Band mounting Solid state swich D-F5/J5, D-F5NT, D-F5W/J59W, D-F5BA, D-F5F Tie rod mounting 1.10-1 Air Cylinder/Standard Series CS1 Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 JR Rod boot/Cushion Rod boot Mounting J K N R H Nylon tarpaulin Heat resistant tarpaulin No cushion With cushion on
Product failure Replace the product. -11No.PS-OMG0009-D Specification Specifications Model No.
Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet
Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to