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Install a Ground Fault Circuit Interrupter(GFCI) to the power supply (IDU8E/11E-20/23 : sensitivity of leak current 30mA and rated current 5A) , (IDU15E1-20/23 : sensitivity of leak current 30mA and rated current 10A). (Prepare by yourself) Specification of power cable Prepare following power cable.

Contact capacity AC200V,5A DC24V,5A for both operation and failure stop signal. 20V, 5mA (AC/DC) 3 2 4. Checks and Inspection Checks and inspection 4.1 Daily check Check the following items daily. Immediately stop the operation in the event of failure, and refer to Chapter 5 Troubleshooting to solve it. There is no compressed air leakage. The START lamp lights up during operation.

Contact capacity AC200V,5A DC24V,5A for both operation and failure stop signal. 20V, 5mA (AC/DC) 3 2 4. Checks and Inspection Checks and inspection 4.1 Daily check Check the following items daily. Immediately stop the operation in the event of failure, and refer to Chapter 5 Troubleshooting to solve it. There is no compressed air leakage. The START lamp lights up during operation.

/N.O./ Double acting LLA2/3/4/5A Manifold LVH2/3/40 N.C. Single unit Direct operated, Manually operated 17-5-27 LLH2/3/4A N.C. Manifold 17-1-8 17-1-9 5 Fluid Compatibility Check List When using the equipment for controlling fluids for various fluids, select the optimum combination between the metal (body, etc.) material and the seal material.

GS Grommet with surge voltage suppressor G Grommet DZ E Grommet terminal EZ Grommet terminal with light/surge voltage suppressor T Conduit terminal TZ Conduit terminal with light/surge voltage suppressor D DIN terminal DZ DIN terminal with light/surge voltage suppressor Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A Construction N.C. N.O.

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode

A SOL.A 2B Black Manifold Options Manifold Exploded View 5A Station 6 Black, SOL.

A Valve q: SY3000-23-24A w: SY5000-221-1A e: SY7000-221-1A SUP stop valve spacer assembly with residual pressure release valve q: SY3000-222-1A w: SY5000-222-1A e: SY7000-222-1A B A B Double check spacer assembly with residual pressure release valve q: SY30M-56-5A w: SY50M-56-5A e: SY70M-56-5A SY30M-56-5A (2 pcs.)

281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A

Nil 30 50 0.6 m ZQ 3 m 5 m ZS-20-5A-50 .1 pc. ZH Table (2) How to Order Connector for Supply Valve and Vacuum Release Valve ZU Caution 1A 36 VJ10 (Applicable to 100 VAC only) ZL When using AC, the DC solenoids are operated via a rectifier. Therefore, when using this type, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids.

B (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM SOL. A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL.

ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

Install a Ground Fault Circuit Interrupter(GFCI) to the power supply (sensitivity of leak current 30mA and rated current 5A). (Prepare by yourself) Specification of power cable Prepare following power cable and signal cable Cable: 1.25mm2(16AWG), Three wicks (The earth is contained).,External diameter: about 8 to 12mm.

Thermo-Con Series Thermo-electric (No-freon) Temperature Controller Features Series expanded from small through medium sizes Specifications Cooling capacity* Control accuracy Temperature setting range Model Power supply HEC105W H110W AC200V, 3A HEC205W 230W AC200V, 5A 1060 0.03 HEC405W 350W AC200V, 4A 240W type 450W type HEC605W 600W AC200V, 5A HEC1005W Prototype 1005W AC200V, 10A 40% energy

5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

Lead wire length Nil 0.6 m 30 3 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 50 5 m 1086 Ejector Valve Unit Series ZYY/ZYX Internal Circuit and Wiring Example How to Set the Pressure How to Use the Connector 1. Attaching and detaching connectors ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

Line filter: 250VAC, 3 to 5A class varistor: for 39 to 47VDC operation Warning Caution VEA25 Appearance VEA250 Adjustment trimmer GAIN NULL DITHER Adjustment trimmer VEA251/2 In VEA252, when the jumper shown above is changed from side 2 to side 1, it is possible to use it without feedback circuit. GAIN SW power source Line filter NULL DITHER Jumper 1.

5A 15A 10A 10A Compressor input 180/200W 50/60Hz 385/440W 50/60Hz Heater input 220W 420W Note 6) Nominal filtration rating 0.01m (99.9% filtration efficiencyNote 6) Buili-in filter specifications Cleanliness of the filter outlet side Particles of 0.3m or more: 3.5 particles/L(ANR)or less Note 6) Protective Overcurrent protection Overload relay devices Heater overheat prevention Thermostat

Lead wire length Nil 0.6 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 30 3 m 50 5 m 13-8-8 9 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Hysteresis Hysteresis is the difference between the pressure at which the output signal turns ON and the pressure at which it turns OFF. It turns ON at the set pressure. 1.

SOL.A 3A () (+) Station 3 SOL.B 3B () (+) SOL.A 4A () (+) Station 4 SOL.B 4B () (+) SOL.A 5A () (+) 2.