Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

LG1H

P S2 A 2 R A1 F Photo micro switch Guide type Nil None H High rigidity direct acting guide 1 2 3 4 NPN 1pc.

Soft Start-up Valve

H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)m-A 3/4,

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

ChemicalThermo-con

HED series W H Temperature Controller Unit: inch (mm) W D H Model Weight HED003 13.2 lbs (6 kg) 3.9 (100) 12.6 (320) 8.5 (215) HED005 17.6 lbs (8 kg) 5.5 (140) 13.8 (350) 8.5 (215) D HED007 28.7 lbs (13 kg) 6.5 (165) 17.6 (447) 8.5 (215) The outline dimensions do not include protruding parts such as the foot flange, screw and connector.

With Factory Installed

~---l---+-+-H 8 0perating pressure is 0.lSMPa{1.Skgf/cm2} or more. 0.15 i;c ,.,:+-t--t..o-t---t--t---"-l--+-H O Orain piping should be .010 tube (inside 0.1 r===t=l===t---H diameter 4mm) and less than Sm in length. 8 Rotate drain cock left direction in manual exhaust for emergency. , ".' " ... ~" O~ 0.2 0.3 OA OS 0.6 0 7 08 0 9 2000 4000 Flow rate /min (ANR) Inlet pressure MPa (Differential

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

BP1000

2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

VXA31/32

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

G H G H G H 149.5 (3 position: 157) VK VZ 2-4.5 mounting hole Manual override (Non-locking) VF 300 (Lead wire length) VFR Pilot EXH port VP4 (External pilot port) VZS Not machined VFS VS4 3-Rc 1/8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center

Non-contact Gripper

C 16.5 L H L H 4 x M depth ML 4 x M depth ML L L 16.5 (mm) Part no.

100

Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 30 (Operating hours: 10 hours/day, Operating days: 250 days/year, 120 cycles/h, when 1 unit is used) Cost conditions *1 Air consumption 100 Peak vacuum pressure 10% reduction -84 Air consumption [L/min (ANR)] Existing model ZL112 ZL1 63 L/min (ANR) Vacuum pressure [kPa] 57 63 Approx.10% reduction Air consumption Existing model (ZL112) ZL1

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

MGC

(mm) Allowable kinetic energy (J) 70 50 100 50 100 40 20 R: 0.35, H: 0.42 R: 7, H: 7.5 25 R: 0.56, H: 0.65 R: 7, H: 7.5 100 32 Total load weight (kg) 32 0.91 7.5 100 25 40 1.8 8.7 10 50 3.4 11.8 100 20 High kinetic energy generated by large loads and high speed operations can be absorbed by compressing air at the stroke end thus preventing shock and vibration being transmitted to the machine

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

High-temperature specification: the AS□-□-H can be used from -5°C to 80°C.
Ex.) AS2000-□-H, AS3000-□-H, AS4000-□-H, AS420-□-H, AS500-06-H, AS600-10-H, etc.

Low-temperature specification: the AS-□-L can be used from -30°C to 60°C.
Ex.) AS3000-□-L, AS4000-□-L, AS5000-□-L, AS420--L, AS500-06-L, AS600-10-L-, etc.

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly