Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series (M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
3-wire (NPN) Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 24 V 12 V Grommet 3-wire (NPN) 5 V, 12 V 3-wire (PNP) Water resistant (2-color indication) 2-wire 12 V With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit IC circuit IC circuit Magnetic field resistant (2-color indication) 2-wire (Non-polar) A96 A93
Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,
Grommet 3-wire (NPN) 3-wire (PNP) 5 V,12 V M9PA Water resistant M9BA (2-color indication) 12 V 2-wire G5BA 5 V,12 V G59F F59F $ $ IC circuit With diagnostic output (2-color indication) 4-wire (NPN) P3DW P4DW Magnetic field resistant 2-wire (Non-polar) (2-color indication) A96 A93 A90 A54 A64 3-wire (NPN equiv.
A96 A96V 5 V IC circuit Grommet Yes A93 A90 A93V A90V IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Lead wire length symbols: 0.5 m .Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.
However, please contact SMC for water-resistant cylinder of 20 and 25. 2 1 m type lead wire is only applicable to D-A93. 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
Consult with SMC regarding water resistant types with the above model numbers. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.
IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.
Electrical entry Wiring (Output) DC AC 0.5 (Nil) 3 (L) 5 (Z) Applicable load Type 1 (M) M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit Solid state switch 5V,12V Relay, PLC 12V Yes Grommet 24V IC circuit Diagnostic indication (2-color indication) 5V,12V 12V 3-wire (NPN equivalent) Grommet 24V IC circuit A96 5V Reed switch Yes A93
Please consult with SMC regarding water resistant type with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.
However, please contact SMC for water resistant products of 12 and 16. *2: The D-P3DWA is mountable on bore size 25 to 100. *3:1 m type lead wire is only applicable to the D-A93. *: Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ *:Solid state auto switches marked with are produced upon receipt of order.
A90 A90V No Reed switch Solid state switch 2-wire 24V A93 A93V Grommet 100V 12V Yes 3-wire (NPN equiv.) IC circuit 5V A96 A96V Mounting bracket part nos.
Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.
NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC
Applicable auto switches/ For 15, 20 Lead wire length (m) Load voltage Indicator light Indicator light Applicable load Auto switch models Special function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) AC DC No A90 5V, 12V IC circuit 100V or less Relay PLC Reed switch Solid state switch 2-wire 24V A93 12V 100V Grommet No 3-wire (NPN equiv.) 3-wire (NPN) A96 5V IC circuit