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21 14 74.6 (Non-locking) Manual override 55 2-1.8 (Bleed hole) With filter (80 Mesh) 5-Rc(PT)1/8 40 25.5 (Piping port) 20 11.5 12 R1 R2 P 1.6 18 22 22 (R1, R2 port) 2-Rc(PT)1/4 63 1.8 (Bleed port) With filter (80 Mesh) 227.2 3-Rc(PT)1/8, 1/4 (P, A, B port) 3 position closed center/exhaust center/pressure center: SYJA7 20-01 3 position closed center/exhaust center/pressure center: SYJA7 400

Pilot Solenoid Specifications Valve Specifications Port size Pilot solenoid valve 6A to 25A 32A to 50A, 32F to 50F VO301-00 SF4--23 Vacuum Fluid Pressure range Pilot pressure range Grommet, Grommet, Grommet, Conduit, terminal, Conduit, terminal, DIN connector, DIN connector Others (Option) 1 to 400 Torr 1 to 760 Torr Electrical entry 100V, 200V, Others (Option) 24V, Others (Option) Coil

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Air supply valve Vacuum release valve Electronic Diaphragm ZSE1-00ZSM1-0 Vacuum pressure switch 30 m PE (Polyethylene) Suction filter Valve Specifications How to operate Pilot type NBR poppet 3 mm2 Compact and lightweight 15.5 mm width, 400 g (full system

Plessure characteristics ser oressure: 0.05 r pa Flow characteristics suppry pfessure: 0.2 MPa Relief flow characterislics supp y pressure: 0.2 tvpa 0.251 arf 0 1 5 | ...l o ooj 200 400 600 Frow rare (l/min iANR)) series ITV 1 000/2000/3000 Series lTV301n Hysteresie Repeatability Pressure Characteristics ssl pGssurB: 0.05 Mpa FlOw CharaCtetistics sLppty pressur: 02 Mpa Reliel llow characterislics

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

After changing their positions. tighlen them firmly again. 100 200 300 400 500 600 700 800 Built-in one-touch fitting / RSQ6 trF Nylon tube, soft nylon tube, and polyurelhane tube Seal Kit-How to Order RSory-P"t [,"; Hri'lj,ffL 20 32 40 50 Construction/parts list Fixed mounting heisht SgfieS RSO Ooubfe acling . double acling wift spring . rolle( rd end Lever rod end wi(h buillin shock absorber

Momnt loading Conventional Systetn lHvatal ou dldebL Multipl mounting optims 30 Standard Strcke (mml 125 150 175 200 225 250 275 300 350 400 I ffi75 100 60 I s OF so 'a so =ooi ;slisawl[soww so I T sow lsawjl:ew11 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a t a a a a a a a a a a a a a a a a a a a a a a a a a a '"?FF_PryFry4F!

board Diameter D (mm) Circular board (mm) Square board (mm) Perpendicular A (mm) (Dimension classification) Horizontal B (mm) 100 x 100 (Maximum dimensions) 14 100 or less 113 D A under 20 to 50 200 or less 190 x 190 16 361 or less 214 under 50 to 100 300 or less 250 x 250 18 625 or less 282 Body size under 100 to 150 350 or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400

Air consumption (l/min (ANR)) 140 120 SUP = 0.5 MPa 100 SUP = 0.3 MPa 80 SUP = 0.2 MPa 60 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air Consumption 400 Air consumption (l/min (ANR)) SUP = 0.5 MPa 350 300 Calculating Air Consumption (PA3000) 250 SUP = 0.3 MPa 200 Find the air consumption for operation with a 4 Hz switching cycle and pilot air pressure of 0.3 MPa from the air consumption graph

1.35 0.90 0.35 0.23 0.16 0.10 80 6.15 4.10 1.75 1.20 0.45 0.30 0.20 0.14 90 7.75 5.15 2.25 1.50 0.56 0.40 0.25 0.17 100 9.60 6.35 2.70 1.80 0.65 0.45 0.30 0.20 125 15.50 9.80 4.20 2.80 1.05 0.70 0.45 0.32 150 23.00 14.50 5.75 4.00 1.45 1.00 0.65 0.45 175 8.10 5.45 2.00 1.30 0.90 0.60 200 10.90 7.10 2.60 1.75 1.15 0.80 250 4.05 2.65 1.80 1.20 300 5.80 3.85 2.55 1.70 350 7.90 5.15 3.55 2.35 400

(Applicable to round bar, chamfered, roller type rod end configurations.) 1.0 1.0 RSH Operating pressure P [MPa] Operating pressure P [MPa] RSQ20 RSQ40 RSQ12 MIW MIS RSQ16 RSQ32 0.5 0.5 RSQ50 0 600 800 400 200 0 50 100 Lateral load F [N] Lateral load F [N] D-X 559-4 A Stopper Cylinder Fixed Mounting Height RSQ Series 12, 16, 20, 32, 40, 50 RoHS How to Order Q M9BW 12 10 RS D D L B 12 Z RS

MSQ20L can be selected. q 0.015 0.01 MSQ10H MSQ10L 0.2 0.4 0.45 0.5 0.3 0.6 0.7 0.8 0.9 1.0 0.001 Rotation time (s/90) 4 Series MSQ Table Displacement (Reference Values) The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where the load is applied. 100 Load A Displacement MSQ10 MSQB1A MSQB10 (Basic type) 100 Displacement m Displacement m 400

Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.

F MXZ12 MXZ16 160 100 OUT side IN side OUT side IN side 140 0.7/ 80 0.7/ Supply pressure [MPa] Supply pressure [MPa] 120 Pressing force [N] Pressing force [N] 100 0.5/0.67 60 0.5/0.67 80 40 0.3/0.4 0.3/0.4 60 40 20 20 0 0 0 20 40 60 80 0 10 20 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXZ25 MXZ20 400 250 OUT side IN side OUT side IN side 350 0.7/ 0.7/ 200 Supply pressure [

1.38 2.32 3.37 1.67 (7) (21) (54) (968) (55) (153.5) (70) (53) (23.5) (27.5) (48.5) (55) (35) (59) (85.5) (42.5) Dimensions by number of stations Model Symbol 2 3 4 5 6 7 8 9 10 NARM2500 L1 4.66 6.30 7.95 9.61 11.26 12.91 14.57 16.22 17.87 (118) (160) (202) (244) (286) (328) (370) (412) (454) L2 4.17 5.83 7.48 9.13 10.79 12.44 14.09 15.75 17.40 (106) (148) (190) (232) (274) (316) (358) (400

Cv VP542-X536 8.9 0.16 2.2 8.9 0.20 2.1 350 VP742-X536 15.1 0.21 3.6 15.3 0.22 3.7 590 VP544-X538 6.5 0.08 1.3 6.7 0.10 1.3 930 VP744-X538 10.3 0.08 2.3 9.7 0.08 2.1 1510 VP544-X555 5.2 0.06 1.1 6.7 0.10 1.3 1105 VP744-X555 9.8 0.08 2.1 9.7 0.08 2.1 2000 Needle Valve/Flow Rate Characteristics (VP544/744-X555) 600 [ 21.2] Flow rate scfm [(L/min [ANR])] 2 1.5 1 500 [17.7] 102 psi [0.7 MPa] 400

Variations/Purpose of Usage (Guide) Flow Rate/Operating Frequency (Supply pressure 0.25 MPa, 24 VDC, Duty ratio 1:1) Flow rate 150 High flow 2 High frequency type Medium flow 100 3 1 Super energy-saving type Ultra high frequency type Low flow 50 150 250 350 400 500 550 650 1200 (Hz) (L/min) Operating frequency Specifications Driver Continuous energization Power consumption OFF response time

Station n L1 L2 Station 2 77 49 Station 20 419 391 3 96 68 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1-5-69

1.35 0.90 0.35 0.23 0.16 0.10 80 6.15 4.10 1.75 1.20 0.45 0.30 0.20 0.14 90 7.75 5.15 2.25 1.50 0.56 0.40 0.25 0.17 100 9.60 6.35 2.70 1.80 0.65 0.45 0.30 0.20 125 15.50 9.80 4.20 2.80 1.05 0.70 0.45 0.32 150 23.00 14.50 5.75 4.00 1.45 1.00 0.65 0.45 175 8.10 5.45 2.00 1.30 0.90 0.60 200 10.90 7.10 2.60 1.75 1.15 0.80 250 4.05 2.65 1.80 1.20 300 5.80 3.85 2.55 1.70 350 7.90 5.15 3.55 2.35 400

SPECIFICATIONS INPUTS VCC 5 12 VDC Vm 12 VDC DIR TTL, DTL, MOS Compatible Low (0) = Decrease High (1) = Increase CLK TTL, DTL, MOS Compatible 225 Hz Fixed frequency Positive Edge Triggered SPECIFICATIONS SUPPLY VOLTAGE 12 VDC SUPPLY CURRENT Min. 400 mA SELECTABLE STEP RANGE 8 8148 steps STEP RATE 225 PPS OUTPUTS 1 MOTOR 170 mA/coil @ 12 VDC, 36 ohms/coil STEP RATE Motor step rate = Clock