(w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)
Temperature: °C), Bracket: R (w/Bracket), Calibration Certificate: None
Temperature: °C), Bracket: R (w/Bracket), Calibration Certificate: None
Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket
Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 150mm, Motor Option: w/o Option, Guide Option: w/o Guide, Cable Type: R (Robotic Cable - Flexible Cable), Cable Length: A (10m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental
Size: 3 (30), Body Material: S (Stainless Steel), Seal Material: N (NBR), Port Size: 03 (3/8), Thread Type: R (Rc), Rated Voltage: 1 (100 VAC), Electrical Entry: WN (M12 Connector w/o Connector Cable, w/Surge Voltage Suppressor)
Accuracy: Basic Type, Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: B (Lock), Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: 92 (LECSN2-T*-9, 200~240V, Absolute, EtherNet/IPâ„¢ Card), I/O Connector: 1 (1.5m)
Size: 100, Motor Mounting Position: D (In-line), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 2 (2m), Driver Type: 92 (LECSN2-T9-9/EtherNet/IPâ„¢, 200V to 240V), I/O Cable Length: 1
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: C8 (8mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)
Size: 100, Motor Mounting Position: RL (Rear, Left), Motor Type: T9 (AC Servo w/ Absolute encoder, 750W output, LECS compatible), Lead (mm): M (1/9 reduction: LET80: 14.44, LET100: 26.67), Stroke: 2000mm, Motor Option: B (with Lock), Cable Type: R (Robotic Cable), Cable Length: 2 (2m), Driver Type: C2 (200-230V, LECSC2-T_), I/O Cable Length: 1 (1.5m)
Size: 100, Motor Mounting Position: R (Right Side Parallel), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: B (10mm), Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: F (Flange), Actuator Cable: S (Standard Cable), Actuator Cable Length: 2 (2m), Driver Type: 92 (LECSN2-T9-9/EtherNet/IPâ„¢, 200V to 240V), I/O Cable Length: 1 (1.5m)
Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Bore Size: Ø32 mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: C (Rubber Bumper, Rod End Female Thread), Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type), Auto Switch: M9PV--Solid State , Gen.
Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Bore Size: Ø63 mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Water Resistant Seal: R (NBR Seal, Nitrile Rubber), Stroke: 75 mm, Body Option: M (Rod End Male Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)
Size: 2 (Series 20), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: S (Stainless Steel), Seal Material: N (NBR), Orifice Diameter/Port Size: 301 (Orifice Diameter: ø3.2mm; Port Size: 1/8), Thread Type: R (Rc), Rated Voltage: 1 (100 VAC), Electrical Entry: DS (DIN Terminal, w/Surge Voltage Suppressor), Oil-free Option: None, Bracket: B (w/ Stainless Steel
Size: 100, Motor Mounting Position: R (Right Side Parallel), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: B (10mm), Stroke: 300mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: H (Foot Bracket for Parallel Motor), Actuator Cable: S (Standard Cable), Actuator Cable Length: A (10m), Driver Type: E2 (LECSN2-T9-E/EtherCAT®, 200V to 240V), I/O Cable
Size: 16, Motor Mounting Position: D (In-line), Motor Type: V6 (AC Servo Motor, Absolute Encoder, 100 W), Lead: B [Size 16: 6mm, Size 25: 8mm (10mm, for Right and Left Side Parallel Type)], Stroke: 100mm, Motor Option: B (w/Lock), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: A (10m), Driver Type: U2 (LECYU2-V, 200~230V, Absolute, MECHATROLINK-III), I/O Cable Length: 1 (1.5m
Water Regulator -X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.