240

H:Distance from the cylinder center axis to the mounting surface for the table L MXY H dimension (mm) MXH6 MXH10 MXH16 MXH20 MTS 24.5 30.5 34.5 41.5 Cylinder shaft center m Load center of gravity Selection Graph z to c (Vertical Mounting) Graph c c Maximum Speed 500 mm/s or Less Graph z z Maximum Speed 100 mm/s or Less 1 100 10 Mass m (kg) Mass m (kg) 20 0.1 16 20 16 1 10 10 6 6 0.01 0.1

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF, output 3 does not go ON even if "C" is turned ON.

Air Slide Table Series MXQ

Applicable cylinder bore size Metal stopper 6 8 12 16 20 25 6 8 12 16 20 25 3 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 B C Applicable slide table Radial internal clearance 19.6 14.7 5.88 2.94 0.98 Max. absorbed energy J 12 11 7 6 5 Stroke absorption mm M 50 to 500 Max. impact

Slit Valve

Standard/XGT222 B Opening size C 50 A A Opening size B 253 112 D !

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Additionally, when running the positioning operation, do not set within 7 mm of both ends.

Compact Pad

Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

PAB-OM-B007-B

set K T PA 5 3 1 C heck valve set K T PA 5 3 6 S w itching valve set K T PA 5 3 7 4 .

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

CVRA1-E

Rotation angle rad Inertia moment kgm For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. ) 1 ( ) 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Toggle Type Air Gripper

Tightening torque Tightening torque Model Screw (Nm) A M6 4.8 B M5 2.8 MHT2-32DZ C M8 12 A M6 4.8 B M6 4.8 MHT2-40DZ C M8 12 A M8 12 B M8 12 MHT2-50DZ C M10 24 A M10 24 B M10 24 MHT2-63DZ C M10 24 13 - 3-4. Construction / Parts list Components No.

VQ1000/2000 Series (PILOT VALVE : V100)

No.VQ1000V-OMM0002-B Solenoid Valve PRODUCT NAME VQ1000/2000 Series (PILOT VALVE : V100) MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4,5 Selection -4,5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -7 Operating Environment -7 Maintenance -7,8 Specific Product Precautions -9,10,11 Trouble shooting -12,13 -1No.VQ1000V-OMM0002-B Safety Instructions These

IR10-OM00007

(IR1000:F.S.=0.2MPa,IR1010:F.S.=0.4MPa,IR1020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa(IR1000 0.005MPa) 1 IR1000 IR1010 IR1020 [MPa] MAX. 1.0 [MPa] () 0.05 [MPa] 0.0050.2 0.010.4 0.010.8 0.2% 0.5% 4.4L/min(ANR) [1.0MPa ] -560 Rc1/8 Rc1/8 [2 ] 0.14kg (1) (0.05MPa) (2) IR1000:0.2MPa (3)2 ON-OFF () (4) -4- (C)2 (C) (A) (A) (C) (A) (C) BLEED SUP(1) OUT(2) SUP N

FGX-OM-R008

A Dimensions: SFE4G/5H/7J Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 -7- Dimensions (Bracket) 1) SFE-BR3 2) SFE-BR4/5/7 Dimensions: SFE-BR4/5/7 Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): The values inside the brackets are given as a guide. -8- Revision history

Floating Joint/Stainless Steel Type Series JS

23 41 7 14 14.3 27 49.2 14.3 1 11000 3

PAB-OM-B006-B

Replacement parts C aution S tart & S top S ee C ircuit E xample 1 C onnect air piping to the port A IR S UP, and transported fluid piping to the suction port F L UID IN and the discharge port F L UID OUT respectively. S et pilot air pressure in the range of 0 .2 MPa and 0 .7 MPa(2 to 7 .1 kgf/c )by using regulator. K eep ball valve open on the discharge side.

High Vacuum Slit Valve

177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S Multiple connector XGT300-50AS For XGT31-50336-C Auto switch ASSY D-sub connector XGT300-50DS For XGT31-50336-F C Connected connector of Auto switch B C Name Order No.

Mini Rotary Actuator

Detection intervals depends on the auto switch mounting structure and set position, therefore some required interval and set positions may not be available. 7.

Low torque Metal seal type Rotary joint

(10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2 P = 8.2 29 8.2 x 7 = 57.4 P = 8.2 4 3 105 15 *5 5 6 7 8 7.5 4.5 25H8 (10) 5.5 (10) 30H8 45 45 1 2 3 1 12 P=45 8 P=30 2 11 4 7 10 3 22.5 5 6 6 7 8 9 4 5 4-M3 x 0.5 thread length 8 P.C.D.48 51 46 2-M4 x 0.7 thread length 8 P.C.D.43 Mounting Brackets/Flanges MQR2-F MQR4-F 2-8 counter bore depth 3 2-4.2 through P.C.D.38

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82