LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

Compact Cylinder/Guide Rod Type Series CQM

130 155 75 80 85 90 95 100 105 110 115 140 165 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 40L x 45L x 50L x 55L x

Cylinder with Lock

110 D-A5m D-A6m n 75 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 85 105 110 115 D-A59W n 85 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 115

CJ2

(mm) MM NA ND h8 NN S T Z Bore A B C D F GA H 6 15 12 14 3 8 14.5 28 M3 X 0.5 16 6 M6 X 1.0 61 (66) 3 117 (122) 0 0.018 0 0.022 10 0 0.022 ( ) in S or Z dimensions: With auto switch With air cushion/Dimensions not mentioned in the below table are the same as the above table. 10 16 15 12 14 4 8 8 28 M4 X 0.7 12.5 8 M8 X 1.0 49 105 15 18 20 5 8 8 28 M5 X 0.8 12.5 M10 X 1.0 50 106 B C GA NA

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

CY Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXPJ6 MXPJ6-10 5, 10 105 1 Precision Air Slide Table Series MXP Specifications MXP6 MXP10 10 MXP6 6 MXP12 12 M5 x 0.8 M3 x 0.5 MXP16 16 Model Cylinder bore size (mm) Port size Fluid Action Operating pressure Proof pressure Air Double acting 0.15 to 0.7MPa 1.05MPa 10 to 60C 50 to 500mm/s (with metal stopper: 50 to 200mm/s) MXP10 Ambient and fluid temperature Operating speed range Rubber

A

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing September, 2000 D-SMC.L.A. P-80 (N)

VP3145/3165/3185

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

Micro-Mist Separator with Prefilter Series AMH

Drain Model Port size A B AMH150 1/8,1/4,3/8 239 80 AMH250 1/4,3/8 252 80 1/2 258 284 AMH350 3/8,1 /2 290 80 (mm) 3/4 Connection Model AMH450 1/2,3/4 1 305 312 80 A 240 B AMH450 AMH550 AMH650 AMH850 3/4B,FF,10K lB,FF,10K 256 AMH550 3/4 ,1 339 80 260 300 349 1 1/2B,FF, 1 OK 2B,FF,10K AMH650 1,11/2 391 80 300 AMH850 11/2,2 540.5 80 380 496.5 SMC CORPORATION 1-16-4,SHIMBASHI,MINATO-KU,TOKYO 105

PSxx-PSV0007

Diagnosis Pressure Unsigned 13bit *: Refer to the table below(Unit specification and pressure measurement value (PD)) 315 measurement value Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Data Pressure measurement value Diagnosis OUT2 OUT1 Unit specification and pressure measurement value (PD) Series Unit Rated pressure range Display / settable range MPa 0 to 1.0 -0.105 to 1.050 * kPa 0 to 1000.0 -105

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

2/3 Port Solenoid Valve for Chemicals

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

X Clearance Opening 105

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

30 52 124 21 31 76 25 19 16 M12 x 1.75 10 26 131 Bore size [mm] M MM N P PG PH PL PW S FV FD FT FX FY FZ Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105

SMC Pneumatic Clean Series

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

Compact Vacuum Unit

ZB1-ZSF-A (ZSE10F) 14.5 to 14.5 psi (100 to 100 kPa) 15.2 to 15.2 psi (105 to 105 kPa) Model (Refer to the standard model number for the switch unit on page 9.)

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

to 105 kPa 10 to 105 kPa Withstand pressure 500 kPa Minimum setting unit 0.1 kPa 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Current consumption 40 mA or less Switch output NPN or PNP open collector: 2 outputs (selectable) Maximum load current 80 mA Maximum applied voltage 28 V (with NPN output) Residual voltage 2 V or less (with

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 Station 20 236.5 228.5 220.5 3 58 50 42 6 89.5 81.5 73.5 8 110.5 102.5 94.5 10 131.5 123.5 115.5 Station 2 47.5 39.5 31.5 4 68.5 60.5 52.5 5 79 71 63 7 100 92 84 9 121 113 105 11 142 134 126 12 152.5 144.5 136.5 13 163 155 147 14 173.5 165.5 157.5 15 184 176 168 16 194.5 186.5 178.5 17 205 197 189 18 215.5 207.5 199.5 19 226 218 210 4-4-16 3 Port Pilot Operated Solenoid

Guide Cylinder/Compact Type Series MGC

Cutout window AM MGQ View A-A MGG Mounting dimensions MGC (mm) Bore size (mm) Stroke range (mm) MGF A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K M N L 20 25 32 40 50 80 84 75 90 6.6 9 60 75, 100, 125, 150, 200 12 13 105 120 55 110 M6 22 106 25 44 38 25 MGZ 95 89 16 13 120 136 84 100 9 9 65 125 M8 27 120 30 52 70 46 32 105 94 16 13 134 150 92 108 9 9 75 140 M8 32 135 35 60 80 50 32 75, 100

Air Catch Sensor Series ISA

1 n 69.3 (Max. 78.4) 60 OUT OUT OUT OUT OUT OUT 19.5 4 11.6 Detection port Rc 1/8 Dimensions: With DIN rail 3 105 140 175 4 140 175 210 5 175 210 245 6 210 245 280 2 70 105 140 Station L1 L2 L3 819 Series ISA Operation guideline: Design data When you design the pneumatic circuit using the air catch sensor, please refer to the data below.