Valve Controller

Stop signal Fig. 22 Sequence Revision A:complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

IBV-OMY0015

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

High Speed 2 Port Valve

Downstream side flow of the valve is restricted. 9 SX10-OMR0002-A Revision ARENEWAL 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved No.SX10-OMR0002-A

Low Profile 2/3-Port Solenoid Valve

. -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Between the fitting and manifold has a leakage. looseness of fitting Insufficient tightening of the fitting lost the sealing capability between the manifold blocks and allowed the 10+/-1Nm) leakage to happen there. 26 Revision history A:Exchange part addition B:Complete Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

VN-OMJ0001

O O O 12 13 14 8 VN*-OMJ0001-B Revision history Renewal PU Renewal PX 1st printing : JW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN*-OMJ0001-B

SGC200-OMJ0004

DC DIN IP65() ( ( ( ( ) ) ) ) (4.5~7) IP65() NL:,R: LED:,R: V: V: 180 AC DIN (DO) DIN :4.57()JIS C 3306 0.51.5mm 22 ,3 O :JIS C2805 R1.25-M4 Y :1.253Y 1.5 2.5~3.75Nm 0.5~0.6Nm () () () DIN 3 0.4~0.5Nm 10 SGC200*-OMJ0004-A , () ( 1(P),12 ) (2 ) (1 ) , 11 SGC200*-OMJ0004-A , , , , 12 SGC200*-OMJ0004-A Revision history A ,JIS RY LW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VN-OMP0001

pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa 0.97MPa ,MPa ,MPa m/s m/s Vm/s Ql/min dmm 8 VN-OMP0001 9 VN-OMP0001 Revision history 1st printing:PT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VN-OMT0001

/ / / / 1.5~2 1) 2) 3) 30 1 1) 2)1 0.1MPa 3)0.1MPa Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 2830 Rc1 3638 Rc1 1/4 4042 2 2 2 2 Rc1 1/2 4850 Rc2 4850 5 VN-OMT0001 VND / / / / 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

Vinyl Chloride Air Operated Valve

1)No main pressure 2)Side failure of piston packing Check to proper pressure Yes Replace product 1)Internal lackage 1)Instrusion of particles 2)Flaws on valve seat Eliminate to proper pressure Replace product Failure of air tight 2)External leakage 1)Tightening failure 2)Breakage of Tighten additionally Replace product diaphragm 8 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

R R R REGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS LVR LVR LVR LVR Series Series Series Series

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved 13

DOC1001322

Product Warranty HRS Series 9-2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-W060

Product Warranty HRL Series 9-2 Revision history Revision B : Dec. 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

HRX-OM-Y098

Product Warranty HRL Series 9-2 Revision Rev.C JAN 2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

HRX-OM-X037

Product Warranty HRL Series 10-2 Revision Revision C[AUG 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

HRX-OM-Z018_E

AJuly 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-Z039_E

AJuly 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HEC_W-E

*Therefore, moisture in the air starts to condensate when the air temperature becomes lower than this temperature. 10-3 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation

DOC1003077

(Temperature control and 1 12 E pump/fan operation enabled) A Display/Operation panel G Power supply connector SET2: Communication Setting Mode B Reservoir Cap H Alarm, RUN/STOP, Communication connector 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice