Battery-less

6 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2 145 156 3 170 181 4 195 206 5 220 231 6 245 256 7 270 281 8 295 306 9 320 331 10 345 356 Stations L Formula L1 = 25 x n + 95 L2 = 25 x n + 106 L1 L2 Terminal mounting stations are not included.

Electric Actuator/Slider Type

+ 0.030 0 150 7 76 n x 6.6 Motor mounting position: Left side parallel LEFS40L Motor mounting position: Right side parallel LEFS40R 153 153 60 60 64 64 (mm) Model L A B n D E LEFS40 -200453.4 6 2 LEFS40 -300553.4 6 2 LEFS40 -400653.4 8 3 LEFS40 -500753.4 10 4 LEFS40 -600853.4 10 4 LEFS40 -700953.4 12 5 LEFS40 -8001053.4 14 6 LEFS40 -9001153.4 14 6 LEFS40 -10001253.4 16 7 206 306 406 506 606

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Table of Contents

J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H -1 -2 -6 -8 -C -J -N -R -W -Z With bracket (With set nut) Float type auto-drain (N.C.)

AC Servo Motor Driver (Pulse input type/Positioning type ）

U V W Approx. 6 PE Screw size: M4 Tightening torque: 1.2 [N m] Mounting hole process drawing 9 2 9.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 Bore size (mm) 6 Kit no. Contents Urethane rubber Bumper Nos. at left !4, !6, !7 !1 CY1B6-PS-N Zinc chromated Carbon steel Piston nut Nos. at left !4, !5, !6, !7, !8 !2 10 CY1B10-PS-N Carbon tool steel Snap ring !3 Nickel plated 50 Set of nos. at left !5, !6, !7, !8 CY1B50-PS-N CY1B6: 7 x 5 x 1 CY1B10: 11 x 9 x 1 63 CY1B63-PS-N NBR Cylinder tube gasket !4 Seal kit includes !4, !6, !

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

6/4 (2) 6/4 8/6 8/6 Built-in One-touch fittings Rod end male thread CUJ Note 1) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

Hydraulic

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

CY1

6 Theoretical output (N) = Pressure (MPa)x Piston area (mm).

CQ2

(#6+#12+#14) Bore (mm) S U Z N O 32 9 Depth 7 58.5 31.5 14 5.5 Note 1) Dimensions of style with rubber bumper are same as standard shown above.

Electric Actuator

force (N) Max. gripping force (N) Max. gripping force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Stroke/both sides (mm) Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 MAX.10 75.4 50.1[57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 59.3 103.4[107.8] 123[127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17 17 141.2 121.2 143 6 8.5 6 6 6 48.9[51.1

Modular Design with Uniform Body Style

25-MLA-X523 [ISE35-N-25-M (Switch body only)]*6 NPN output, Wiring top entry ISE35-R-25-MLA-X523 [ISE35-R-25-M (Switch body only)]*6 Digital pressure switch PNP output, Wiring bottom entry ISE35-N-65-MLA-X523 [ISE35-N-65-M (Switch body only)]*6 PNP output, Wiring top entry ISE35-R-65-MLA-X523 [ISE35-R-65-M (Switch body only)]*6 *1 The assembly consists of a bracket and set nuts.

Table of Contents

Note 6) When the current output is selected.

Cylinder with Lock

Auto Switch Made to Order n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)*1 75 + 50 (n 2) (n = 2, 4, 6, 8)*1 80 + 50 (n 2) (n = 2, 4, 6, 8)*1 85 + 50 (n 2) (n = 2, 4, 6, 8)*1 Double Acting, Single Rod Double Acting, Double

ZP

F Hexagon width across flats 7 Bellows Bellows B C A D E F N Y P B N P A Model Model ZPR06B-0-A8 ZPR10B-0-A10 6 7 3.3 9.1 16 25 33.9 50 13.8 12 10 5.5 5.5 ZPR08B-0-A8 13 ZPR13B-0-A10 10.1 8 9 4.7 18.5 27.5 36.4 52.5 19 15 8.7 7.5 8.5 ZPR16B-0-A10 20 29 37.9 54 21 16 18 9.9 Dimensions by Stroke Dimensions by Stroke F: 4 F: 6 E C D Model 10 13 16 J K: 4 K: 6 G H G H Model ZPRB 6-0-A8 G H G

VM

tube Mounting hole 6 N F.O.F. 2.5 mm P.T.