Model: 41 (AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power Supply

Model: 41 (AC), Bar Length: 46 (460mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &

Model: 41 (AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)

Model: 41 (AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 7H (ø1/4" Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Remote connection system status Specification Str Frunzei 29, Sector 2, Bucharest, Romania W-MS SLOVAKIA (421) 41 321321 1 Remote (EX600-WSV#) can be used regardless of the communication specification of the base. (3) Set the "base" system.

Sensor Monitor

Sub display (left) setting Set the sub display (left) from the selection list on page 41. Press the button to set. Move to sub display (right) setting. Return to function selection mode. Sub display (right) setting Set the sub display (right) from the selection list on page 41. Press the button to set. Return to function selection mode.

Digital Flow Switch

and terminology 12 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 22 Default settings 22 Function Setting [Function selection mode] 24 Default settings 25 F0 Reference condition/Unit selection function 26 F1 Setting of OUT1 28 F2 Setting of OUT2 36 F3 Response time 41

Digital Flow Switch (Manifold type)

Width across flats of attachment With across flats of the main port 3/8 20.9 mm 1 41 mm 1/2 23.9 mm 3/4 29.9 mm After hand tightening, tighten the hexagon head bolt 2 to 3 rotations by using a spanner. Refer to the table below for the tightening torque.

LFE-OMZ0012

Apply a tool Width across flats of attachment Port size Width across flats 3/8 24 mm 1/2 28 mm 3/4 35 mm Turn the pipe 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

DOC1001322

usage time of dustproof filter .5-26 5.4.6 Software version screen .5-27 5.4.7 Setting screen .5-27 Temperature rise/drop alarm (AL10/AL11).5-28 TEMP READY alarm (AL12) of TEMP READY function .5-30 Offset (TEMP OFFSET) function .5-33 Pump operation mode .5-36 Discharge pressure alarm (AL18/AL19/AL20) .5-37 Electric conductivity and alarm setting (AL28) .5-39 5.4.8 Function setting screen .5-41

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

K35-OMW0030

Residual Pressure Release . 41 7-7. Functions of LED Alarm Display . 42 7-8. Priority of Operation Mode . 43 7-9. Fail-safe function . 43 7-10. HART Communication protocol . 44 7-11. Operation Examples (Timing Chart) . 45 8. Replacement of parts . 52 8-1-1. Disassembly of the controller assembly . 52 8-1-2. Assembly of the controller assembly . 53 8-2-1.

MX-OMP0051

21.2 21.2 32.9 33.9 33.9 33.9 46.9 46.9 32.9 71.9 71.9 16 D-F8 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6 19.6 MXQ8(A,C) 11.9 11.9 11.9 11.9 11.9 11.9 19.1 19.1 19.1 25.1 42.1 19.1 MXQ12(A,C) 14.5 14.5 14.5 14.5 14.5 14.5 14.5 28.1 20.1 20.1 28.1 28.1 47.1 47.1 MXQ16(A,C) 18.6 18.6 18.6 18.6 18.6 18.6 18.6 18.6 34 28 28 35 35 41

MONOSASHI-KUN WITH BRAKE CONTROLLER

(refer to P.41 11-2) 39 After reviewing of number of brake operation, press WRITE to switch to next input operation. The display will indicate PRG STEP P7 and present origin detection time. Next, enter desired origin detection time. The setting range is 09.99sec (1 unit as 10msec). Set the date with taking into the consideration of cylinder operating conditions.

CEx-OMQ0011

L (mm) (mm) 25 32 40 12000(1mm) 25 MY-A25L 25 MY-S25A MY-S25B 32 MY-A32L 32 MY-S25A MY-S25B 40 MY-A40L 40 MY-S32A MY-S32B 6-2 CEU2 NPN P PNP 24 6-3 CE1-R 05 5m 10 10m 15 15m 20 20m C A B CD E F G () 25 7-1 AA BB CC DD EE HA KA KB KK 9 45.5 5.5 M5x0.8 9.5 69 30.5 16 M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102 41.5 19 M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41

Cylinder with lock

Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.