HRX-OM-Z002

temperature . 4-2 4.3 OPERATION START AND STOP . 4-3 4.3.1 Starting the Product . 4-3 4.3.2 Stopping the product . 4-4 4.4 CHECK ITEMS DURING STARTUP . 4-4 4.5 ADJUSTMENT OF CIRCULATING FLUID FLOW RATE . 4-5 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 LIST OF FUNCTIONS . 5-1 5.2 FUNCTION . 5-2 5.2.1 Key operations . 5-2 5.2.2 List of display and setting . 5-4 5.3 MAIN MENU

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

hole & Double end tapped): MQQTB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke

VT317

3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port.

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Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

Guide Cylinder Series MGG

retaining ring for hole Carbon tool steel Nickel plated Bracket Aluminum alloy White anodized 371 Series MGG Dimensions Basic style: MGGB 20 to 50 4 x F through, counterbore G Bottom 4 x H N M 4 x O C D Bracket (Refer to the table below.)

VT325

4-7-17 2 Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

This is the same concept representing the easy to run through as sonic conductance C (effective area). (3) Formula of flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n 2) 2 100 + 30 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 90 + 30 n = 4, 8, 12, 16 2 95 + 30 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 115 130 20 120 125 n D-Y7BAL 20 + 45 n = 2, 4, 6, 8 (n 2) 2 (n 4) (n 4) (n 4) (n 4) 2 115 + 45 n = 4, 8, 12, 16 120 + 45 n = 4, 8, 12, 16 125 + 45 n = 4, 8, 12, 16 130 + 45 n = 4, 8, 12, 16 2 2 2 6-9-8

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L d 0.030 0.060 0.030 0.060 0.040 0.076 0.040 0.076 12 16 20 25 12 16 20 25 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 4 5 5 6 8 10 13 17 9.2 11.5 15.0 19.6 IY-G012 IY-J015 IY-G02 IY-G03 NTJ-015A NT-015A NT-02 NT-03 Axial C style 5 Axial C style 5 Axial C style 8 Axial C style 10 0.7 0.7 0.9 1.15 1.5 1.5 1.5 1.55 10.2 12.2 16.2 20.2 4.8 4.8 7.6 9.6 5 5 8 10 14.6 16.6 21 25.6 Inch Threads

Fieldbus System

Note 4) Not applicable for dual 3-port valves N.O. N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) Note) C 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) N.C. N.O.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band Band

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lead wire with connector 1.5 45 44 1.5 F02 C01 25 8.5 25 8.5 M5 x 0.8 Thread depth 5 G1/4 Rc1/8 17 Piping port Rc1/8 Piping port G1/4 Gasket 1.5 52.7 46.7 1.5 A2 B2 25 8.5 25 8.5 URJ1/4 TSJ1/4 Piping port URJ1/4 Piping port TSJ1/4 28 ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) Piping direction Piping specification 25 41.7 1.5 2 x 2.6 Depth 12 or less 12 11 4.5 02L 30 4.5 R1/

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

7

S n Thread type Nil Rc1/4 NPT1/4 G1/4 TN TF Bore size Made to Order MK 40 50 63 40 mm 50 mm 63 mm Refer to page 422 for details.

Compact Cylinder with Air Cushion

Also, BBA2 is included when an auto switch alone is shipped. 4 Series RQ Dimensions/ 20, 25 Refer to page13 for proper auto switch mounting positions and height. Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Manifold Specifications

Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1(P), 5/3(R) port 2(B), 4(A) port 1 4/2 (P A/B) 4/2 5/3 (A/B R) VV5Z5-21P-01 VV5Z5-21P-C6 VV5Z5-21P-C8 VZ523 1/4 1/4 1/4 1/8 C6 C8 2.1 1.4 1.8 0.36 0.32 0.37 0.55 0.36 0.50 2.3 2.1 2.1 0.26 0.24 0.20 0.54 0.50 0.50 Note) Value at manifold base mounted, 2 position single operating How

-fl Seies

i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

(See note 2.) .I" END "B Er{O "4" El|D o c c o o c o st noit I Srrlro[ 2 $rl|oir ! STA!|O|{ a @

HRX-OM-W002

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA