JSY1000/3000/5000 Series (Plug-in)

Substrate inside Manifolds 30 The substrate inside of manifolds cannot be taken apart. Attempting to do so may damage parts. 36 Caution Fixation of DIN Rail Mounting Type Manifolds 1.

JSY1000/3000/5000 Series (Non Plug-in)

Please use caution and do not apply a stress of 30 N or greater. Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently tightened. Caution *Connector cable should be mounted in the correct direction.

3 Port Air Operated Valve

Connection Female Thread: Rc, NPT, NPTF Wrench tightening angle Tightening torque after tightened by hand Uni thread size (Nm) (deg) 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 Connection Female Thread: G Wrench tightening angle Tightening torque after tightened by hand Uni thread size (Nm) (deg) 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 5 VT301**-OMH0007-B VTA301 Series 3 Port Air Operated Valve

Pressure Relief 3 Port Valve with Locking Holes

Recommended tightening torque Unit: N m Thread size 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 4. When using SMC fitting or S coupler, please refer to "Tightening torque of operation manual. -4- Warning 5. Do not apply torsion or bending moment other than the product's own weight. Support external piping separately as it may cause breakage.

Series CKQG/CKQP Guide Pins Assembly,Clamp Arm Assembly Kit Number

hole (Round/Without Shim) CKQG-R178 CKQG-R298 CKQG-R179 CKQG-R299 CKQG-R180 CKQG-R300 CKQG-R175S CKQG-R295S CKQG-R297S CKQG-R177S For 18 hole (Round/With Shim) For 30 hole (Round/With Shim) CKQG-R298S CKQG-R178S CKQG-R299S CKQG-R179S CKQG-R300S CKQG-R180S CKQG-D175 CKQG-D295 CKQG-D297 CKQG-D177 For 18 hole (Diamond/Without Shim) For 30 hole (Diamond/Without Shim) CKQG-D178 CKQG-D298 CKQG-D179

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5% F.S. or less (at 25C water) Repeatability 1% F.S. or less (at 25C water) Temperature characteristics 5% F.S. or less (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for display unit PF2D 300/301 Pulse output (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30

Series AS-FM/AS-M/ASD-FM

Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa 0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Trimmer Auto Switch Series D-
7K/D-R
K

D-RNK 21.1 6 30 2-3.5 46 5 Connector for sensor e-con 3

Mechanically Jointed Rodless Cylinder Series MY1

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) One touch fitting lot Ve' tube r: :-,1 o.o97 \44) r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

3 Port Solenoid Valve SYJ300/500/700 Series

Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q Q How To Order .page 19 Q SYJ300 .pages 20-21 SYJ500 .pages 22-23 SYJ700 .pages 24-25 SYJA .pages 26-27 Q Q Q Drawings.page 29 Q SYJ300 .pages 30

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 12 Series XMH, XYH Stainless steel High Vacuum Angle/In-line Valve Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6-4.4 6-6.6 L2 XMH-16

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Platform Cylinder Series CXT

CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 0.015 0.019 0.044 0.180 0.123 0.109 3 7 12 20 30 50 60 70 125 125 140 170 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 For moving and transferring workpieces. For moving the receptacle for workpieces used in stamping or press-fitting processes. For using as a Pick & Place unit in combination with other actuators.

FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling